Miniature spectrometer based on a Fourier transform spectrometer chip and a commercial photodetector array  

作　　者：Xiao Ma Jun Zou Wenhuan Li Jian-Jun He 马骁;邹俊;李文环;何建军(College of Optical Science and Engineering,Zhejiang University,Hangzhou 310027,China;College of Science,Zhejiang University of Technology,Hangzhou 310023,China;Zhejiang Lightip Electronics Technology Co.,Ltd.,Wenzhou 325000,China)

机构地区：[1]College of Optical Science and Engineering,Zhejiang University,Hangzhou 310027,China [2]College of Science,Zhejiang University of Technology,Hangzhou 310023,China [3]Zhejiang Lightip Electronics Technology Co.,Ltd.,Wenzhou 325000,China

出　　处：《Chinese Optics Letters》2019年第12期87-91,共5页中国光学快报（英文版）

基　　金：supported in part by the National Natural Science Foundation of China(Nos.61535010and 61605172);in part by the Public Project of Zhejiang Province(No.2016C33074);the research fund from Zhejiang Lightip Electronics Technology Co.,Ltd

摘　　要：We demonstrate a novel type of miniature spectrometer based on a Fourier transform spectrometer(FTS)chip with a dense output array and a commercial photodetector(PD)array.The FTS chip has an output array cycle of 20μm and consists of 51 Mach–Zehnder interferometers(MZIs),and the PD array is a commercial linear charged coupled device(CCD).An achromatic triplet lens is used to image the MZI output interferogram onto the CCD with a small aberration.Our experiment result shows that a free spectral range(FSR)from 489 nm to 584 nm and a retrieved spectral resolution of 3.5nm at 532nm are obtained.The achieved properties show that our spectrometer has the potential to outperform the best commercial compact one in terms of most performance indices.We demonstrate a novel type of miniature spectrometer based on a Fourier transform spectrometer(FTS) chip with a dense output array and a commercial photodetector(PD) array. The FTS chip has an output array cycle of 20 μm and consists of 51 Mach–Zehnder interferometers(MZIs), and the PD array is a commercial linear charged coupled device(CCD). An achromatic triplet lens is used to image the MZI output interferogram onto the CCD with a small aberration. Our experiment result shows that a free spectral range(FSR) from 489 nm to 584 nm and a retrieved spectral resolution of 3.5 nm at 532 nm are obtained. The achieved properties show that our spectrometer has the potential to outperform the best commercial compact one in terms of most performance indices.

关 键 词：COMMERCIAL array TRANSFORM 

分 类 号：TH744.1[机械工程—光学工程] TN15[机械工程—仪器科学与技术]