波长渐变滤光片的设计与测试探讨  

Study of Design and Measurement for Variable Filter

作　　者：王忠连[1] 任少鹏[1] 阴晓俊[1] 王瑞生[1] 高鹏[1] 班超 胡雯雯[1] WANG Zhong-lian;REN Shao-peng;YIN Xiao-jun;WANG Rui-sheng;GAO Peng;BAN Chao;HU Wen-wen(Shenyang Academy of Instrumentation Science CO.,LTD.,Shenyang 110043,China)

机构地区：[1]沈阳仪表科学研究院有限公司

出　　处：《真空》2020年第1期21-25,共5页Vacuum

摘　　要：基于膜厚渐变-波长渐变的原理设计了波长渐变滤光片,介绍了基于反应磁控溅射镀膜工艺制造波长渐变滤光片的制备工艺,设计了渐变膜厚的修正掩膜板。探讨了波长渐变滤光片的测试技术。The variable filter is designed based on the principle of film thickness and wavelength variable.The fabrication of variable filter based on reactive magnetron sputtering coating machine was introduced,and the correction mask with variable film thickness is designed.The measurement of variable filter is discussed.

关 键 词：波长渐变滤光片 渐变掩膜板 磁控溅射 渐变光谱测试 

分 类 号：O436[机械工程—光学工程] TB43[理学—光学]