K掺杂量对氧化锌薄膜晶体结构和光学性能的影响  

Effect of K dopant amount on crystal structure and optical properties of ZnO thin films

作　　者：王玉新[1] 李真 王媛媛 赵帅 王磊[1] 张巍[1] WANG Yuxin;LI Zhen;WANG Yuanyuan;ZHAO Shuai;WANG Lei;ZHANG Wei(School of Physics and Electronic Technology,Liaoning Normal University,Dalian 116029,China)

机构地区：[1]辽宁师范大学物理与电子技术学院

出　　处：《辽宁师范大学学报（自然科学版）》2020年第1期39-44,共6页Journal of Liaoning Normal University:Natural Science Edition

基　　金：辽宁省教育厅科学技术研究项目(LJ2019006)

摘　　要：利用溶胶-凝胶旋涂法(sol-gel)在玻璃衬底上制备了不同K掺杂量的K-N共掺ZnO薄膜.采用X射线衍射仪(XRD)、扫描电子显微镜(SEM)、紫外-可见分光光度计(UV-Vis)和光致发光谱(PL)对样品的晶体结构、表面形貌和光学性能进行了表征.结果表明:与未掺杂样品相比,K-N元素共掺之后,薄膜结构仍保持六方纤锌矿型且沿c轴择优生长;随着K掺杂量的增加,样品的(002)衍射峰强度先增强后减弱,而对薄膜的紫外发光峰影响不大.当K掺杂量(原子比)为0.060时,晶粒尺寸最大,结晶性能最优,紫外发光峰强度相对较大.利用紫外-可见分光光度计对薄膜的光学透过率进行研究,结果表明不同K掺杂量的K-N共掺ZnO薄膜其光透过率没有明显变化,均维持在80%左右.K-N co-doped ZnO thin films were prepared on glass substrates by sol-gel spin-coating with different K doping contents.The crystal structure,surface morphology and optical properties of the samples were investigated by X-ray diffractometer(XRD),scanning electron microscope(SEM),UV-Vis spectrophotometer(UV-Vis)and photoluminescence(PL).The results show that,compared with the undoped samples,the structure of the samples remains hexagonal wurtzite type and the preferred orientation along the c-axis after co-doping.As the amount of K doping increases,the(002)diffraction peak intensity of the sample first increases and then decreases,but has little effect on the UV luminescence peak of the films.When the K doping amount(atomic ratio)is 0.060,the crystal size is the largest,the crystallinity is the best,and the intensity of UV luminescence peak is relatively large.The optical transmittance of the ZnO films was studied by UV-Vis spectrophotometer.The results show that the optical transmittance of K-N co-doped ZnO films with different K doping contents has no obvious change and is maintained at about 80%.

关 键 词：K掺杂 ZNO薄膜 透过率 光致发光谱 溶胶-凝胶法 

分 类 号：O484.1[理学—固体物理]