时栅角位移传感器误差测试及补偿  

Error Testing and Compensation of The Time-Grating Angular Displacement Sensor

作　　者：张天恒[1,2] 周启武[1,2] 王阳阳[1,2,3] 郑永 ZHANG Tianheng;ZHOU Qiwu;WANG Yangyang;ZHENG Yong(Engineering Research Center of Mechanical Testing Technology and Equipment,Ministry of Education,Chongqing University of Technology,Chongqing University of Technology,Chongqing 400054,China;Chongqing Key Laboratory of Time-Grating Sensing and Advanced Testing Technology Chongqing University of Technology,Chongqing 400054,China;State Key Laboratory of Mechanical Transmission Chongqing University,Chongqing 400044,China)

机构地区：[1]重庆理工大学机械检测技术与装备教育部工程中心,重庆400054 [2]重庆理工大学时栅传感及先进检测技术重庆市重点实验室,重庆400054 [3]重庆大学机械传动国家重点实验室,重庆400044

出　　处：《传感技术学报》2020年第1期91-95,共5页Chinese Journal of Sensors and Actuators

基　　金：国家重大科研仪器研制项目(51827805);重庆市科委科技计划项目(cstc2017jcyjax0392,cstc2017jcyjAX0400,cstc2017jcyjAX0122)。

摘　　要：在工业现场,角位移传感器校准受特殊条件的限制,很难用标准器进行密集误差采样来提高精度。针对该问题提出了一种稀疏误差采样及补偿方法。在分析时栅角位移传感器的感应信号的基础上,提出稀疏采样第1个对极内细分误差+对极点零位误差的测补方式,给出用激光干涉仪获取零位和细分误差的方法及采用稀疏采样的误差补偿模型进行补偿的具体过程。以72对极时栅角位移传感器为对象进行研究,实验结果表明:该方法充分剔除了零位误差且补偿了细分误差,在稀疏采样的条件下即可实现整周范围的有效补偿,大大提高了修正效率和测量精度,时栅传感器的精度达到2.69″。In the industrial site,the angular displacement sensor calibration restricted by special conditions,it is difficult to use standard for dense sampling error to improve the precision.According to the problem a sparse sampling and error compensation method is proposed.Based on the analysis of the induction signal of the time grating angular displacement sensor,a method of the first pole subdivision error+pole zero error measurement and compensation with sparse sampling is proposed.The method of obtaining zero position and subdivision error with laser interferometer and the process of compensation with sparse sampling error compensation model are given.A time grating angular displacement sensor with 72 poles are studied.the result shows that:this method can fully eliminate the zero position error and compensate the subdivision error.Under the condition of sparse sampling,it can realize the effective compensation of the full-circle error,greatly improving the correction efficiency and measurement accuracy.The accuracy of the time grating sensor reaches 2.69″.

关 键 词：时栅 零位误差 细分误差 稀疏采样 误差补偿 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]