基于有限元法的12μm微测辐射热计单元设计  

Design of 12μm Microbolometer Based on Finite Element Method

作　　者：史佳欣 陈超 王军 SHI Jiaxin;CHEN Chao;WANG Jun(School of Optoelectronic Science and Engin.,University of Electronic Science and Technol.of China.Chengdu 610054,CHN)

机构地区：[1]电子科技大学光电科学与工程学院,成都610054

出　　处：《半导体光电》2020年第1期15-19,共5页Semiconductor Optoelectronics

摘　　要：基于多物理场有限元分析与理论计算相结合的方法,采用Intellisuite软件完成了12μm×12μm微测辐射热计结构的设计与仿真,具体工作包括:单元结构二维版图及工艺流程设计和单元结构三维精确建模,结合实际MEMS结构的材料参数,进行了电学与热电耦合多物理场有限元仿真模拟分析。通过仿真优化获得探测单元的主要热电参数、响应时间和响应率,分别为:热导4.31×10-8 W/K、热容2.69×10-10 J/K、电压响应率(未经后端读出电路放大)7 200V/W、热响应时间6.24ms。采用所提出的微桥设计仿真方法,可显著提高器件设计效率和设计精度,缩短研发周期,可满足超大规模小像元非致冷红外焦平面探测器的设计要求。Combining the methods of multi-physics finite element analysis and theoretical calculation,a unit structure of 12μm×12μm microbolometer was designed and simulated by Intellisuite software,including:2Dlayout of unit structure,process design and 3D accurate modeling of the unit structure.Based on the material parameters of actual MEMS structure,finite element simulations were performed by electrical and thermal-couple multiphysics.The main thermoelectric parameters,response time and response rate of the detection unit were obtained through simulation optimization.And the thermal conductivity of 4.31×10-8 W/K,heat capacity 2.69×10-10 J/K,voltage response rate of 7 200V/W and the thermal response time of 6.24ms were obtained.The proposed micro-bridge design can improve the design efficiency and accuracy effectively,shorten the development cycle,and meet the design requirements of ultralarge-scale small-pixel uncooled infrared focal plane detectors.

关 键 词：微测辐射热计 小像元 非致冷红外焦平面探测器 有限元仿真 热电耦合分析 

分 类 号：TN215[电子电信—物理电子学]