Laser-driven programmable non-contact transfer printing of objects onto arbitrary receivers via an active elastomeric microstructured stamp  

作　　者：Hongyu Luo Chengjun Wang Changhong Linghu Kaixin Yu Chao Wang Jizhou Song 

机构地区：[1]Department of Engineering Mechanics,Soft Matter Research Center,and Key Laboratory of Soft Machines and Smart Devices of Zhejiang Province,Zhejiang University,Hangzhou 310027,China

出　　处：《National Science Review》2020年第2期296-304,共9页国家科学评论（英文版）

基　　金：the National Natural Science Foundation of China(11622221,11621062 and 11872331);the National Basic Research Program of China(2015CB351901);the Shenzhen Science and Technology Program(JCY20170816172454095);the Fundamental Research Funds for the Central Universities.

摘　　要：Transfer printing, as an important assembly technique, has attracted much attention due to its valuable merits to develop novel forms of electronics such as stretchable inorganic electronics requiring the heterogeneous integration of inorganic materials with soft elastomers. Here, we report on a laser-driven programmable non-contact transfer printing technique via a simple yet robust design of active elastomeric microstructured stamp that features cavities filled with air and embedded under the contacting surface, a micro-patterned surface membrane that encapsulates the air cavities and a metal layer on the inner-cavity surfaces serving as the laser-absorbing layer. The micro-patterned surface membrane can be inflated dynamically to control the interfacial adhesion, which can be switched from strong state to weak state by more than three orders of magnitude by local laser heating of the air in the cavity with a temperature increase below 100℃. Theoretical and experimental studies reveal the fundamental aspects of the design and fabrication of the active elastomeric microstructured stamp and the operation of non-contact transfer printing. Demonstrations in the programmable transfer printing of micro-scale silicon platelets and micro-scale LED chips onto various challenging receivers illustrate the extraordinary capabilities for deterministic assembly that are difficult to address by existing printing schemes, thereby creating engineering opportunities in areas requiring the heterogeneous integration of diverse materials such as curvilinear electronics and Micro LED displays.

关 键 词：tunable adhesion transfer printing heterogeneous integration LASER-DRIVEN 

分 类 号：TN60[电子电信—电路与系统] TS805[轻工技术与工程]