AlN超声换能器声场的仿真分析  

Simulation Analysis of Acoustic Field of AlN Ultrasonic Transducer

作　　者：陈继明 马希直[1] 李响[1] CHEN Jiming;MA Xizhi;LI Xiang(College of Mechanical and Electrical Engineering,Nanjing University of Aeronautics and Astronautics,Nanjing 210016,China)

机构地区：[1]南京航空航天大学机电学院,江苏南京210016

出　　处：《机械制造与自动化》2020年第2期108-112,共5页Machine Building & Automation

基　　金：国家自然基金资助项目(51475229)。

摘　　要：超声换能器声场性能是换能器优劣的一个重要指标,对声场中的一系列理论进行了分析推导,分别对换能器声场进行频域和瞬态分析。频域分析中研究了声压、声压级随频率变化规律、油液区域中声场的分布、衰减的问题。瞬态分析中展示了声波在油液域的传播过程,对比了声信号在换能器两侧的传播,分析声波在各个反射界面的强度变化。结果与理论分析一致性较好,为后续利用设计制作换能器提供一定的依据。The sound field performance of an ultrasonic transducer is its important index.A series of theories in the sound field are analyzed and derived,and then the frequency domain and transient analyses of its sound field are performed.In the frequency domain analysis,it shows the sound pressure level change with frequency,and distribution and attenuation of the sound field in the oil region.The transient analysis shows the propagation process of sound waves in the oil domain.The propagation of the sound signals on both sides of the transducer is compared.The intensity changes of the sound waves at various reflection interfaces are analyzed.The results are in good agreement with the theoretical analysis.A basis is provided for designing and manufacturing the transducer.

关 键 词：ALN 换能器 声波 声场 

分 类 号：TB552[理学—物理]