锆钛酸铅压电陶瓷的流延法制备及其性能  

Preparation and properties of lead zirconate titanate piezoelectric ceramics via tape casting

作　　者：张少峰 袁晰 闫明洋[1] 王晓宇 高峰[2] 周科朝[1] 张斗[1] ZHANG Shao-feng;YUAN Xi;YAN Ming-yang;WANG Xiao-yu;GAO Feng;ZHOU Ke-chao;ZHANG Dou(State Key Laboratory of Powder Metallurgy,Central South University,Changsha 410083,China;Beijing Spacecraft System Engineering,Beijing 100094,China;School of Chemistry and Chemical Engineering,Central South University,Changsha 410083,China)

机构地区：[1]中南大学粉末冶金国家重点实验室,长沙410083 [2]北京空间飞行器总体设计部,北京100094 [3]中南大学化学化工学院,长沙410083

出　　处：《中国有色金属学报》2020年第2期326-332,共7页The Chinese Journal of Nonferrous Metals

基　　金：国家自然科学基金资助项目(51672311);湖南省科技计划项目(2016WK2022)。

摘　　要：流延法工艺具有工艺便捷、尺寸可调、成膜质量好等优势。采用流延法制备PZT压电陶瓷,通过扫描电子显微镜观察压电陶瓷微观形貌,通过准静态d33测量仪测试压电陶瓷的压电应变常数d33。探究粉末粒径以及流延工艺参数包括刮刀高度、流延速度、热压压力等对PZT压电陶瓷性能的影响,获得的PZT压电陶瓷其压电应变常数d33最高可达454 pC/N,致密度最高可达97.68%。该方法适用于制备大尺寸压电器件。The tape casting method has several advantages,such as convenient process,adjustable size and better film forming quality.The lead zirconate titanate(PZT)piezoelectric ceramics were prepared by tape casting.The microstructure of the piezoelectric ceramics was observed by scanning electron microscope.The d33 of piezoelectric ceramics was detected by a berlincourt d33 meter.The effects of powder particle size,blade height,casting speed were studied,and the pressure of hot pressing process on properties of PZT ceramics was also studied.Then,high quality PZT piezoelectric ceramics were obtained with the piezoelectric strain constant d33 reaching up to 454 pC/N,and the highest density could reach to 97.68%.This method is also suitable for the preparation of large-size piezoelectric devices.

关 键 词：锆钛酸铅 压电陶瓷 流延成型 致密度 压电应变常数 

分 类 号：TB321[一般工业技术—材料科学与工程]