质子注入掺镱磷酸盐玻璃平面光波导的近红外特性  

Near-infrared Properties of Optical Planar Waveguides Formed by H+Ion Implantation in Yb 3+-doped Phosphate Glasses

作　　者：吕婧妍 郭海涛[2] 徐君 刘春晓 LU Jing-yan;GUO Hai-tao;XU Jun;LIU Chun-xiao(College of Electronic and Optical Engineering&College of Microelectronics,Nanjing University of Posts and Telecommunications,Nanjing 210023,China;State Key Laboratory of Transient Optics and Photonics,Xi′an Institute of Optics and Precision Mechanics,Chinese Academy of Sciences,Xi′an 710119,China;School of Electronic Engineering,Xi'an Aeronautical University,Xi′an 710077 China)

机构地区：[1]南京邮电大学电子与光学工程学院、微电子学院,南京210023 [2]中国科学院西安光学精密机械研究所瞬态光学与光子技术国家重点实验室,西安710119 [3]西安航空学院电子工程学院,西安710077

出　　处：《光子学报》2020年第4期83-87,共5页Acta Photonica Sinica

基　　金：The National Natural Science Foundation of China(No.11405041);the Nanjing University of Posts and Telecommunications Scientific Foundation(No.NY219101);the Key Research and Development Program Project of Shaanxi Province(No.2019GY-112)。

摘　　要：在能量为(0.5+0.55)MeV和剂量为(1.0+2.0)×10^16 ions/cm^2的条件下,通过氢离子注入制备了掺Yb^3+磷酸盐玻璃波导,并研究了该波导在近红外波段的特性.棱镜耦合法测量的离子注入波导的导模的有效折射率与反射计算法计算的有效折射率基本吻合.通过模拟辐照引起的空位分布,探讨了离子注入平面波导的形成理论.利用FD-BPM对波导中的传播模式进行了模拟,结果表明高能量的氢离子注入掺Yb 3+磷酸盐玻璃能够制备出近红外波导结构.The Yb 3+-doped phosphate glass waveguides by the hydrogen-ion implantation under the condition of energies of(0.5+0.55)MeV and doses of(1.0+2.0)×10^16 ions/cm^2 were fabricated,and characteristics of the waveguide were studied in the near-infrared band.The change of refractive index after the implantation was measured by the prism coupling method,which corresponded well with the calculated effective refractive index by the reflectivity calculation method.The formation theory of the ion-implanted planar waveguides was discussed through simulating the vacancy distribution induced by the irradiation.The propagation mode of light in the waveguide was simulated by using the FD-BPM,which suggested that the near-infrared waveguide structure could be fabricated by irradiating the Yb^3+-doped phosphate glass with the energetic hydrogen ions.

关 键 词：波导 近红外波段 离子注入 掺镱磷酸盐玻璃 折射率分布 

分 类 号：TN252[电子电信—物理电子学]