CrAlN抗冲蚀涂层制备及性能研究  

Study on Preparation and Properties of CrAlN Anti-erosion Coating

作　　者：刘灵云 林松盛[1,2] 王迪 李风 代明江[2] 石倩 韦春贝 LIU Ling-yun;LIN Song-sheng;WANG Di;LI Feng;DAI Ming-jiang;SHI Qian;WEI Chun-bei(School of Materials and Energy,Guangdong University of Technology,Guangzhou 510006,China;National Engineering Laboratory of Modern Materials Surface Engineering Technology,Guangdong Provincial Key Laboratory of Modern Surface Engineering Technology,Guangdong Institute of New Materials,Guangzhou 510651,China)

机构地区：[1]广东工业大学材料与能源学院,广东广州510006 [2]广东省新材料研究所,现代材料表面工程技术国家工程实验室,广东省现代表面工程技术重点实验室,广东广州510651

出　　处：《真空》2020年第2期40-46,共7页Vacuum

基　　金：国家重点研发计划项目(2016YFB0300400);广东省科技计划项目(2017A070701027,2014B070705007);广东省科学院科技提升项目(2017GDASCX-0202,2017GDASCX-0111)。

摘　　要：为提高钛合金材料抗冲蚀性能,利用真空阴极电弧沉积技术在TC11钛合金上沉积CrAlN涂层,研究靶电流、偏压和气压对涂层结构及性能的影响。采用扫描电镜观察膜层表面和截面形貌,金相显微镜对表面的大颗粒进行定量分析;显微硬度计测量膜层的维氏显微硬度;采用喷砂试验机对涂层的抗冲蚀性能进行测试,通过三维表面轮廓仪测量涂层厚度和侵蚀坑的深度;X射线衍射仪表征涂层中的晶体结构。结果表明:靶电流从70A增大到110A,虽可提高涂层的沉积速率,但会导致涂层表面大颗粒增加,从而降低涂层的抗冲蚀性能;气压从1Pa增大至4Pa,可有效地减少涂层表面颗粒的尺寸及数量,但也会一定程度降低沉积速率及硬度;偏压对CrAlN涂层的结构及性能影响最大,偏压在-50V时涂层呈(200)择优取向,-100V涂层呈(111)择优取向,-200V时,涂层择优取向不明显;且随着偏压的增加,涂层的硬度及抗冲蚀性能增大,在高冲蚀角下,冲蚀的失效机理为脆性失效。结论:工艺参数中靶电流对表面质量的影响最大;涂层的生长取向与偏压密切相关;CrAlN涂层的表面质量及硬度直接影响其抗砂粒冲蚀性能,偏压对涂层抗冲蚀性能影响最大。最终优化的工艺参数为:靶电流90A、偏压-100V、气压4Pa。In order to improve the erosion resistance of titanium alloy material,Cr AlN coating was deposited onto TC11 titanium alloy by vacuum cathodic arc deposition technique.The effects of target current,bias voltage and furnace pressure on the structure and properties of the coating were investigated.Scanning electron microscopy was used to observe the surface and crosssection of the film layer.Metallographic microscope was used to quantitatively analyze the large particles on the surface.Microhardness tester was used to measure the Vickers microhardness.The sandblasting tester was used to resist the erosion of the coating.The properties were tested by measuring the thickness of the coating and the depth of the etch pit by a three-dimensional surface profilometer.The X-ray diffractometer characterizes the crystal structure in the coating.Increasing the target current from 70 A to 110 A,although increasing the deposition rate of the coating,it will increase in the number of large particles on the surface of the coating to decrease the erosion resistance of the coating.The furnace pressure is increased from 1 Pa to 4 Pa,which is effective to reduce the size and quantity of particles on the surface of the coating,but also reduce the deposition rate and hardness to a certain extent.The bias has the greatest influence on the structure and properties of the Cr AlN coating.When the bias voltage is-50 V,the coating has a preferred orientation of(200).The 100 V coating has a(111)preferred orientation.At-200 V,the preferred orientation of the coating is not obvious;and as the bias voltage increases,the hardness and erosion resistance of the coating increase,and at high erosion angles,the failure mechanism of erosion is brittle failure.The target current has the greatest influence on the surface quality in the process parameters;the growth orientation of the coating is closely related to the bias voltage;the surface quality and hardness of the CrAlN coating directly affect the erosion resistance of the sand,and the influence of

关 键 词：钛合金 CrAlN涂层 抗冲蚀 靶电流 偏压 气压 

分 类 号：TG178[金属学及工艺—金属表面处理] TB43[金属学及工艺—金属学]