斐索干涉仪中压电陶瓷的非线性校正  

Nonlinear Correction of Piezoelectric Ceramic in Fizeau Interferometer

作　　者：王芳[1] 卢庆杰[1] 韩森[1,2] WANG Fang;LU Qingjie;HAN Sen(School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology,Shanghai 200093,China;Suzhou H & L Instruments LLC, Suzhou 215123,China)

机构地区：[1]上海理工大学光电信息与计算机工程学院,上海200093 [2]苏州慧利仪器有限责任公司,江苏苏州215123

出　　处：《压电与声光》2020年第2期273-277,共5页Piezoelectrics & Acoustooptics

基　　金：国家重点研发计划基金资助项目(2016YFF0101903)。

摘　　要：相移器是斐索干涉仪的核心部件,其关键为压电陶瓷(PZT)致动器,而其迟滞非线性特性严重影响了相移精度,对光学元件的形貌检测造成不利影响。该文首先设计了PZT的控制系统,利用National Instruments(NI)动态数据采集设备(PCIe-6321)、LabVIEW系统及电压放大器组成电压驱动系统产生驱动信号,利用电阻式应变仪、惠斯通电桥作为位移传感器采集位移;其次,提出了一种多项式模型及基于PZT传递函数的前馈开环校正算法对PZT进行建模及校正;最后,在实验系统上对该算法进行了验证。实验结果表明,校正后,相移器的相移误差可被改善,校正前、后位移差小于10%。该系统可有效校正非线性,从而降低非线性相移对测量结果的影响,满足检测光学元件面形的高精度要求。The phase shifter is the core component of Fizeau interferometer and the key component is piezoelectric ceramic actuator.However,the piezoelectric ceramic actuator has hysteresis and nonlinear characteristics which seriously affects the precision of the phase shifter and adversely affects the surface shape detection of optical components.Therefore,a control system of PZT is designed,which uses the National Instruments(NI)dynamic data acquisition equipment(PCIe-6321),LabVIEW system and voltage amplifier to form a voltage drive system to generate drive signals,and uses the resistance strain gauge and Wheatstone bridge as the displacement sensor to collect the displacement.Secondly,a polynomial model is established and a feedforward open-loop correction algorithm based on the PZT transfer function are proposed to model and correct the PZT.Finally,the algorithm was verified on the experimental system.The experimental results show that the phase shift error of the phase shifter can be improved,and the difference between uncorrected and corrected displacement is less than 10%.The system can effectively correct the hysteresis nonlinear characteristic of piezoelectric ceramic actuator,so as to reduce the influence of nonlinear phase shift on the measurement results and meet the high precision requirements of detecting optical element surface shape and system.

关 键 词：斐索干涉仪 相移器 传递函数 前馈开环 非线性 

分 类 号：TM282[一般工业技术—材料科学与工程] TH741[电气工程—电工理论与新技术]