基于湿法清洗中快排槽节水性能的优化研究  

Research on Water-saving Performance of Quick Dump Rinse Tank Based on Wet Cleaning Equipment

作　　者：赵宏亮 高津平[1] 刘建民 边晓东 ZHAO Hongliang;GAO Jinping;LIU Jianmin;BIAN Xiaodong(The 45^th Research Institute of CETC,Beijing 100176,China)

机构地区：[1]中国电子科技集团公司第四十五研究所,北京100176

出　　处：《电子工业专用设备》2020年第2期53-56,共4页Equipment for Electronic Products Manufacturing

摘　　要：现有的清洗设备中,当完成晶圆的清洗工艺后,再次利用快速排水的工艺方法会消耗大量水资源。针对这一问题,探讨了一种适用于该类工艺流程的节水设计方案。通过改进排放阀的结构,将废水排放与回收功能集成相结合,使得去离子水的利用率得到了提高,不仅节约了成本,并且避免了资源的浪费。In the wet cleaning equipment,when the wafer cleaning process is completed,the rapid drainage process will consume a lot of water resources.A water-saving design scheme suitable for the kind of process is discussed.By improving the structure of the quick dump cylinder and integrating the wastewater discharge and recycling functions,the utilization rate of deionized water is improved,which not only saves costs but also avoids waste of resources.

关 键 词：晶圆清洗 快排阀 快排槽 

分 类 号：TN305[电子电信—物理电子学]