光栅尺位移测量系统热态特性分析  

Analysis of Thermal Characteristics of Grating Displacement Measurement System

作　　者：胡发伟 张文涛[1] 熊显名[1] 杜浩 Hu Fawei;Zhang Wentao;Xiong Xianming;Du Hao(School of Electrical Engineering and Automation,Guilin University of Electronics Technology,Guangxi,Guilin,541004,China)

机构地区：[1]桂林电子科技大学电子工程与自动化学院,广西桂林541004

出　　处：《仪器仪表用户》2020年第5期1-5,共5页Instrumentation

基　　金：国家科技重大专项(02专项)子课题(No.2017ZX02101007-003)。

摘　　要：以光栅尺位移测量系统为研究对象,考虑直流电机和激光电磁热等热源对测量光栅以及读数头等光栅尺位移测量系统主要部件的影响,应用COMSOL有限元分析软件对测量光栅和读数头镜组进行了热-结构耦合分析。结果表明:测量系统工作1h,测量光栅附近温度升高1℃,达到稳态时的光栅最大形变值为0.49μm,由此带来的光栅在X方向上的零位漂移误差和示值误差最大可达到-0.49μm;读数头镜组最大形变值为0.09,平均热漂移系数为0.05,镜组温度和折射率呈现出明显的梯度分布。研究结果为实际工程应用中纳米级位移测量的环境控制提供了参考。Taking nanometer grating displacement measurement system as the research object,considering the influence of heat sources such as LBDC motor and laser electromagnetic heat on the main components of the grating displacement measurement system such as scale and reading head,COMSOL finite element analysis software was used to measure the grating and reading head.A thermo-structure coupling analysis was performed.The results show that the measuring system works for 1 hour,the temperature near the measuring grating is increased by 1°C,and the maximum deformation value of the grating when the steady state is reached is 0.49nm.The resulting zero shift error and indication error of the grating in the X direction The maximum can reach-0.49nm;the maximum deformation value of the reading lens group is 0.09,the average thermal drift coefficient is 0.05,and the temperature and refractive index of the lens group show a clear gradient distribution.The research results provide a reference for environmental control of nano-grating displacement measurement in practical engineering applications.

关 键 词：位移测量 光栅尺 读数头 热变形 有限元 

分 类 号：TH89[机械工程—仪器科学与技术]