非制冷IRFPA像元结构与时空随机噪声的优化理论  

Optimal theoretical study of the pixel structure and spatio-temporal random noise of uncooled IRFPA

作　　者：冯涛 金伟其 司俊杰[2] 张海军 FENG Tao;JIN Wei-Qi;SI Jun-Jie;ZHANG Hai-Jun(School of Optoelectronics,Beijing Institute of Technology,Key Laboratory of Photoelectronic Imaging Technology and System,Ministry of Education of China,Beijing 100081,China;China Airborne Missile Academy,Henan Luoyang 471009,China;North Guangwei Technology Inc.,Beijing 100089,China)

机构地区：[1]北京理工大学光电学院光电成像技术与系统教育部重点实验室,北京100081 [2]中国空空导弹研究院光电器件研究所,河南洛阳471009 [3]北方广微科技有限公司,北京100089

出　　处：《红外与毫米波学报》2020年第2期142-148,共7页Journal of Infrared and Millimeter Waves

基　　金：Key Projects of the National Natural Science Foundation of China(61231014);Doctoral Fund priority development project of Ministry of Education of China(20131101130002).

摘　　要：非制冷红外焦平面探测器(Uncooled IRFPA)像元结构从单层结构向双层结构的发展降低了探测器噪声,提升了性能。介绍了像元的MEMS结构及主要物理参数,指出双层结构与单层结构的主要差异在于像元有效面积和桥臂热导的不同。三维噪声模型是对IRFPA噪声进行分析的有效手段,其中时空随机噪声是非制冷IRFPA最主要的噪声成份。分析了非制冷IRFPA时空随机噪声的产生机理,建立了时空随机噪声模型,得到时空随机噪声与像元有效面积和桥臂热导的关系。将某款单层像元结构探测器改进为双层像元结构并进行噪声测试,实测数据证明了非制冷IRFPA时空随机噪声模型的有效性。The development of uncooled IRFPA pixel structure from a single-layer structure to a double-layer structure reduces noise and improves performance.The pixel structure and its main physical parameters are introduced.It is noted that the main difference between the double-layer structure and the single-layer structure lies in the difference in the effective area of the pixel and thermal conductivity of the bridge leg.The 3-D noise model is an effective method to analyze IRFPA noise,in which spatio-temporal random noise is the main noise part of uncooled IRFPA.The mechanism of spatio-temporal random noise in uncooled IRFPA is analyzed,and a spatiotemporal random noise model is established.The relationship between spatio-temporal random noise,the effective area of the pixel,the thermal conductivity of the leg is obtained.An uncooled IRFPA with a single-layer pixel structure is improved by changing it into a double-layer pixel structure,and the noise is measured.The measured data proved the effectiveness of the uncooled IRFPA spatio-temporal random noise model.

关 键 词：非制冷红外焦平面探测器 时空随机噪声 三维噪声模型 双层结构 微测辐射热计 

分 类 号：TN215[电子电信—物理电子学]