一维4H-碳化硅光栅红外光学特性及红外尺应用  

Infrared optical properties of one-dimensional 4H-SiC gratings and its nano-ruler application

作　　者：买尔旦·吐合达洪 樊晨芳 李晓温 石卉 刘锋 TUHTASUN Merdan;FAN Chen-Fang;LI Xiao-Wen;SHI Hui;LIU Feng(Department of Physics,Shanghai Normal University,Shanghai 200234,China;Key Laboratory for Astrophysics,Shanghai Normal University,Shanghai 200234,China)

机构地区：[1]上海师范大学物理系,上海200234 [2]上海师范大学上海市星系与宇宙学半解析研究重点实验室,上海200234

出　　处：《红外与毫米波学报》2020年第2期221-227,共7页Journal of Infrared and Millimeter Waves

基　　金：上海市科学委项目(19590746000,18590780100,17142200100);上海市教委科研创新计划(2019-01-07-00-02-E00032);国家自然科学基金联合基金项目(U1931205)。

摘　　要：从理论和实验上对极化材料4H-SiC一维光栅的光学特性进行了研究。发现该结构中存在四种光学模式:传播表面声子极化激元、偶极子天线、局域表面声子极化激元和准静态表面声子极化激元。进一步利用传播表面声子极化激元对于光栅结构参数的敏感性和原子层沉积技术生长介质材料,观察到了沉积材料厚度变化和传播表面声子极化激元的峰位偏移量呈现线性关系。该研究有助于新型微纳器件如纳米尺、传感器等的开发。The optical properties of one-dimensional 4 H-SiC gratings have been studied both theoretically and experimentally.Four optical modes are observed in the grating structure:propagating surface plasmon polaritons(PSPhPs),dipole mode,localized surface phonon polaritons and quasi-static surface phonon polaritons.Furthermore,dielectric materials with various thicknesses were deposited on the grating surfaces by the atomic layer deposition.By utilizing the sensitivity of the PSPhPs mode to the parameters of the grating structure,a linear relation between the change of the thickness of the deposited materials and the offset of the PSPhPs peak position has been observed and deduced.These findings here could provide guidance for various applications of novel micro/nano devices,such as the nano-ruler and nano-sensor.

关 键 词：4H-SIC 表面声子极化激元 纳米尺 

分 类 号：TN21[电子电信—物理电子学] O441.4[理学—电磁学]