Sn掺杂量对Sn-Al共掺ZnO薄膜光学性能的影响  

Effect of Sn-doped on optical properties of Sn-Al co-doped ZnO thin films

作　　者：王玉新[1] 赵帅 王磊[1] 李真 蔺冬雪 陈苗苗[1] WANG Yu-xin;ZHAO Shuai;WANG Lei;LI Zhen;LIN Dong-xue;CHEN Miao-miao(School of Physics and Electronic Technology,liaoning Normal University,Dalian 116029,China)

机构地区：[1]辽宁师范大学物理与电子技术学院,辽宁大连116029

出　　处：《光电子．激光》2020年第2期156-160,共5页Journal of Optoelectronics·Laser

基　　金：辽宁省教育厅科学研究基础研究项目“Ⅲ-Ⅴ族元素掺杂ZnO薄膜的制备及其光电性能研究”(LJ2019006)资助项目.

摘　　要：利用溶胶-凝胶(sol-gel)法在玻璃和硅衬底上制备了不同Sn掺杂量的Sn-Al共掺的ZnO薄膜。采用X射线衍射仪(XRD)、扫描电子显微镜(SEM)、紫外可见分光光度计(UV-Vis)、光致发光谱(PL)等测试手段,对薄膜的结构、形貌和光学性能进行了表征。结果表明:所制备的样品晶粒均沿(002)方向择优生长,且随着Sn元素掺杂量的增加,择优取向性先增强后减弱,同时薄膜的半高宽先减小后增大,半高宽最小时,薄膜的结晶质量最好。与只掺Al元素的ZnO薄膜相比,共掺后的薄膜近紫外发光峰的强度明显降低,出现了轻微的蓝移,且在600 nm处的缺陷发光强度明显增强;随着Sn掺杂量的增加薄膜的透过率先增加后减小。与AZO薄膜相比,当Sn的掺杂量为0.020时,薄膜的结晶质量更好,缺陷发光更强,光透过率更高。The Sn-Al co-doped ZnO thin films with different doping amount of Sn were prepared on glass and silicon substrates by the sol-gel method.The structure,morphology and optical properties of the films were characterized by X-ray diffractometer(XRD),scanning electron microscope(SEM),UV-Vis spectrophotometer and photoluminescence(PL).The results show that the grains of the prepared samples grow favourably along the direction of(002).With the increase of the doping amount of Sn elements,the preferred orientation first increases and then decreases,and the full width at half maxima of the films decreases first and then increases.When the half-width of the films reach the minimum,the crystalline quality of the film is the best.Compared with the ZnO thin films doped only with Al elements,the intensity of near ultraviolet light emission peaks of the co-doped films decreased obviously with slight blue shift,and the intensity of defect luminescence at 600 nm was obviously enhanced.With the increase of the amount of Sn doping,the permeability of the thin films increases first and then decreases.Compared with AZO films,when the doping amount of Sn is 0.020,the crystalline quality of the films is better,the luminescence of defects is stronger and the optical transmittance is higher.

关 键 词：溶胶-凝胶法 ZNO薄膜 Sn掺杂量 Sn-Al共掺薄膜 光学性能 

分 类 号：O484.1[理学—固体物理]