基于LabVIEW的MEMS电容式压力传感器测试系统设计  

DESIGN OF MEMS CAPACITIVE PRESSURE SENSOR TEST SYSTEM BASED ON LABVIEW

作　　者：郝秀春[1] 陈忠位 李宇翔 王佳伟 何沛凌 Hao Xiuchun;Chen Zhongwei;Li Yuxiang;Wang Jiawei;He Peiling(School of Mechanical Engineering,Jiangsu University,Zhenjiang 212013,Jiangsu,China)

机构地区：[1]江苏大学机械工程学院,江苏镇江212013

出　　处：《计算机应用与软件》2020年第5期62-66,共5页Computer Applications and Software

基　　金：国家自然科学基金项目(51575248)。

摘　　要：设计基于LabVIEW的MEMS电容式压力传感器测试系统,包括压力产生和自动控制装置部分及电容数据采集存储部分。采用NI myDAQ、标准压力传感器和高频电磁阀,结合LabVIEW的PID工具包实现压力自动控制。通过GPIB协议和MySQL数据库实现与阻抗分析仪通信和数据存储。实验结果表明,该系统满足测试需求,为传感器的制作和性能评价提供有力参考,降低了传感器测试的复杂程度,具有很高的实用价值。This paper designs the MEMS capacitive pressure sensor test system based on LabVIEW,including the pressure generation and automatic control device and the capacitance data acquisition and storage part.We used NI myDAQ,standard pressure sensor,high frequency electromagnetic valve,and LabVIEW's PID toolkit to realize automatic pressure control.Through GPIB protocol and MySQL database,communication with impedance analyzer and data storage were realized.The experimental results show that the system meets the test requirements,provides a strong reference for the production and performance evaluation of sensors,reduces the complexity of sensor testing,and has a high practical value.

关 键 词：LABVIEW GPIB MYSQL PID 

分 类 号：TP3[自动化与计算机技术—计算机科学与技术]