EHD喷墨打印制备微热板气敏材料的研究  

Study of Gas Sensing Materials on Micro Hotplate with Electrohydrodynamics Inkjet Printing

作　　者：曹睿 余隽[1] 吴昊[1] 朱思鹏 李中洲[1] 唐祯安[1] CAO Rui;YU Jun;WU Hao;ZHU Si peng;LI Zhong zhou;TANG Zhen an(School of Biomedical Engineering,Faculty of EE,Dalian University of Technology,Liaoning IC Technology Key Lab,Dalian 116024,China)

机构地区：[1]大连理工大学电信学部生物医学工程学院,辽宁省集成电路技术重点实验室,辽宁大连116024

出　　处：《仪表技术与传感器》2020年第4期11-14,19,共5页Instrument Technique and Sensor

基　　金：国家自然科学基金项目(61874018,61131004,61274076)。

摘　　要：采用静电流体动力学(EHD)喷墨打印技术在微热板上沉积了气敏材料。将纳米气敏材料分散到溶剂中制备出墨水,研究了墨水材料、打印距离和针头尺寸等参数对起始电压的影响,实验结果与理论估算相一致。在制备微热板气体传感器的过程中,利用计算机控制三坐标平移台移动实现微热板与打印点的对准。采用外径为300μm、内径为180μm的针头,调节打印距离和电压,实现了气敏材料在微热板上的定位微滴打印。EHD喷墨微滴打印过程稳定,无针头堵塞现象,液滴直径约65μm,满足微热板打印需求。制备的气体传感器对甲醛表现出良好的气敏响应。Electrohydrodynamics inkjet printing was applied for deposition of gas sensing materials on micro-hotplate.Gas sensing powder was dispersed into the solvent to form ink.The effects of ink solvent,print distance and needle size on the starting voltage were studied,and the experimental results agreed well with the theoretical estimation.In the process of the micro-hot-plate gas sensor fabrication,the micro hotplate was placed on a three-axis precision controlled stage,so that the needle can accurately print the ink onto the micro hotplate.The needle with outer diameter of 300 μm and inner diameter of 180 μm was used,and print distance and voltage were adjusted to get appropriate size of droplet to match the micro-hot plate.The EHD inkjet printing process was stable without needle clogging,and the diameter of the droplet was about 65 μm.The gas sensor was used for formaldehyde detection,which exhibited good sensing performance.

关 键 词：静电流体动力学(EHD)喷墨打印 微热板 气体传感器 纳米材料 电喷 气敏材料 墨水 

分 类 号：TN305[电子电信—物理电子学]