一种在真空室内OLED掩模板与镀膜基片的自动分离机构  

An automatic separation mechanism between an OLED mask and a coated substrate in a vacuum chamber

作　　者：王银果 Wang Yinguo(Dong guan Xinke technology research and development co.,LTD.,Dongguan Guangdong,523087)

机构地区：[1]东莞新科技术研究开发有限公司,广东东莞523087

出　　处：《电子测试》2020年第10期94-95,68,共3页Electronic Test

摘　　要：本机构主要包括磁性掩膜板夹持机构、顶柱嵌套机构、夹持器顶轮机构和掩膜板接受台。主要功能是在真空室内将完成镀膜后的掩膜板从夹持机构中分离,从而达到掩膜板与镀膜基片在真空状态下完成全自动分离动作的工艺要求,提高掩膜板在真空镀膜生产线中的分离、清洗维护及使用效率,从而提高镀膜生产线的生产效率。This mechanism mainly includes magnetic mask plate clamping mechanism,top column nesting mechanism,clamping wheel jacking mechanism and mask plate receiver.Main function is to mask after vacuum chamber will finish coating plate separation from holding mechanism,so as to achieve the mask plate with coating substrate under the vacuum state to complete automatic separation technological requirements of operation and improve the mask plate in vacuum coating production line of separation and cleaning maintenance and efficiency,so as to improve the production efficiency of coating production line.

关 键 词：磁性掩膜板 基片 磁力吸板 夹持器 顶柱 顶轮 

分 类 号：TN383.1[电子电信—物理电子学] TH112[机械工程—机械设计及理论]