金属玻璃薄膜的研究进展  

Advances in Thin-film Metallic Glasses

作　　者：刘林根 董闯[1,2] 吴爱民 林国强[1] 万鹏[3] LIU Lin-gen;DONG Chuang;WU Ai-min;LIN Guo-qiang;WAN Peng(Dalian University of Technology,Dalian 116024,China;Dalian Jiaotong University,Dalian 116024,China;Foshan Shunde Midea Electro-thermal Appliances Manufacturing Co.,Ltd,Foshan 528300,China)

机构地区：[1]大连理工大学,辽宁大连116024 [2]大连交通大学,辽宁大连116024 [3]佛山市顺德区美的电热电器制造有限公司,广东佛山528300

出　　处：《表面技术》2020年第5期11-18,共8页Surface Technology

基　　金：顺德区科技计划项目(201911220001);国家自然科学基金项目(51761010);国家重点研发计划项目(2016YFB0101206)。

摘　　要：金属玻璃因具有良好的软磁特性、塑性好、耐磨损、耐腐蚀、表面光滑等特点,近几十年来受到广泛关注。块体状金属玻璃在室温下具有宏观脆性和加工性能差的缺点,限制了其应用,而薄膜态金属玻璃易于实现,并且可以克服块体玻璃本身的脆性缺陷,因而成为研究热点。综述了近十年来金属玻璃薄膜的研究成果,介绍了金属玻璃薄膜的制备方法,包括已经在工业中投入使用的物理气相沉积技术和电镀法,其中磁控溅射方法和电弧离子镀应用较多。阐述了金属玻璃薄膜的不粘性、抗疲劳性、耐腐蚀性、生物相容性、耐磨性、光学性能和催化性能以及相关影响因素,发现Zr基MGTF能够同时表现出多种性能,综合性能最佳,薄膜的不粘性值得特殊关注。表述了金属玻璃薄膜在改善合金性能、生物医疗领域和半导体领域的应用,在生物医用材料上镀膜可提高生物医用材料的不粘性和抗菌性,加速伤口愈合,具有很大潜力。最后,通过总结金属玻璃薄膜投入使用可能会面临的挑战和需要解决的问题,对今后的研究趋势进行了展望。Metallic glasses are widely used due to its good soft magnetic properties,good plasticity,wear resistance,corrosion resistance,surface smooth and other characteristics.Bulk metallic glass has the disadvantages of macro brittleness and poor processing performance at room temperature,which limits its application,while thin-film metallic glass is easy to be manufactured and can overcome the brittleness defects of bulk glass,thus becoming a research hotspot.The research achievements of thin-film metallic glass in recent ten years were summarized,the preparation methods were introduced,including physical vapor deposition and electroplating which have been used in industry,among which magnetron sputtering and arc ion plating are widely used.The properties of non-adhesion,fatigue resistance,corrosion resistance,biocompatibility,wear resistance,optical performance,catalytic performance and related influencing factors were elaborated.It is found that Z-MGTF can show many kinds of performance at the same time,and the comprehensive performance is the best,the film non-adhesion deserves special attention.The application of metallic glass film in improving alloy properties,biomedical and semiconductor fields is described,coating on biomedical materials can improve the non-viscosity and antibacterial properties of biomedical materials and accelerate wound healing,which has great potential.Finally,the future research trends in this field were prospected by summarizing the challenges and problems to be solved in the application of metallic glass thin film.

关 键 词：金属玻璃薄膜 磁控溅射法 不粘性 抗疲劳性 生物医用材料 

分 类 号：TG174.4[金属学及工艺—金属表面处理]