微测辐射热计的热响应时间测试方法  

Test Method for Thermal Response Time of Microbolometer

作　　者：史杰 李静 董珊 陈文礼 王宏臣 SHI Jie;LI Jing;DONG Shan;CHEN Wen-li;WANG Hong-chen(Yantai IRay Technology Co. , Ltd. , Yantai 264006, China)

机构地区：[1]烟台艾睿光电科技有限公司,山东烟台264006

出　　处：《红外》2020年第1期21-26,共6页Infrared

摘　　要：热响应时间是微测辐射热计的关键参数,它会制约非制冷红外探测器的最高工作帧频。热响应时间的像元级测试能够真实反映传感器的物理热响应时间,为产品设计优化提供及时、有效的数据支持,因此准确测量该参数具有十分重要的意义。但目前像元级测试方法均未能有效补偿微测辐射热计的自热效应,无法精准地测量热响应时间。基于频率响应法测试了微测辐射热计的有效热响应时间。通过用电阻温度系数对自热效应进行补偿,可以精确测量物理热响应时间。通过实验分析了不同偏置电流下测得的物理热响应时间。结果表明,该方法准确度高,稳定性强。Thermal time constant is a key parameter of the microbolometer,which constrains the maximum frame frequency of uncooled infrared detector.The pixel-level test of thermal response time can truly reflect the physical thermal response time of the sensor,and provide timely and effective data support for product design optimization.It is very important to accurately measure this parameter.However,the current pixel-level test methods have not been able to effectively compensate the self-heating effect of microbolometers,and can not accurately measure the thermal response time.The effective thermal response time of the microbolometer is measured based on the frequency response method.The self-heating effect is compensated by the resistance temperature coefficient,and the physical thermal response time can be accurately measured.The physical thermal response time measured under different bias currents is experimentally analyzed.The results show that this method has high accuracy and strong stability.

关 键 词：微测辐射热计 热响应时间 自热效应 频率响应 

分 类 号：TN215[电子电信—物理电子学]