高功率脉冲磁控溅射技术制备掺氮类金刚石薄膜的磨蚀性能  

Tribocorrosion performance of Nitrogen-doped diamond like carbon coating by high power impulse magnetron sputtering technique

作　　者：沈永青 张志强 廖斌[1,2] 吴先映[1,2] 张旭[1,2] 华青松 鲍曼雨[3] Shen Yong-Qing;Zhang Zhi-Qiang;Liao Bin;Wu Xian-Ying;Zhang Xu;Hua Qing-Song;Bao Man-Yu(Key Laboratory of Beam Technology and Materials Modification of Ministry of Education,College of Nuclear Science and Technology,Beijing Normal University,Beijing 100875,China;Beijing Radiation Center,Beijing 100875,China;Beijing Jinlunkuntian Special Machine Co.,Ltd.,Beijing 100083,China)

机构地区：[1]北京师范大学核科学与技术学院,北京100875 [2]北京市辐射中心,北京100875 [3]北京金轮坤天特种机械有限公司,北京100083

出　　处：《物理学报》2020年第10期203-213,共11页Acta Physica Sinica

基　　金：广东省重点领域研发计划(批准号:2019B090909002);国家科技重大专项(批准号:2017-VII-0012-0108);国家自然科学基金联合基金(批准号:U1865206)资助的课题.

摘　　要：掺氮类金刚石薄膜在生物应用中很有前景,研究其摩擦和腐蚀的协同作用有很大的实际意义.论文使用高功率脉冲磁控溅射(high-power impulse magnetron sputtering,HiPIMS)技术,在奥氏体不锈钢和单晶硅片上以Ar气和氮气为前驱气体,室温下制备了致密的掺氮类金刚石薄膜.使用配备三电极电化学池的往复型摩擦磨损试验机,在Hank’s平衡盐溶液中研究了不同靶脉冲持续时间制备的薄膜的摩擦腐蚀性能,并在滑动之前、期间和之后监测了薄膜的开路电位(open circuit potential,OCP).电化学工作站用于表征摩擦前薄膜的电化学行为.结果表明:60μs制备的掺氮类金刚石薄膜展示了优异的耐磨蚀性能,其摩擦系数最低(0.05)且在摩擦阶段OCP显示了最高的稳定值(39 mV),这主要归功于其致密的结构和较大的表面能;而90μs下制备的薄膜由于可以形成交联结构的sp^3键含量明显下降,从而导致薄膜孔隙率增加,薄膜的抗腐蚀性下降,在磨蚀过程中由于电解液在孔隙的腐蚀使得薄膜/基体的界面结合强度减弱,在摩擦的综合作用下,薄膜脱落,发生失效.Nitrogen-doped diamond like carbon film is promising in biological applications,studying the synergistic tribocorrosion performance is indispensable.In this paper,Nitrogen-doped diamond like carbon films were deposited on AISI 304 L austenitic stainless steels and Si substrate by using the high power impulse magnetron sputtering technique using Ar and N2 as precursors at room temperature.The effect of target pulse duration on the structure,mechanical properties,corrosion resistance and tribocorrosion properties in Hank’s equilibrium salt solution and the corresponding mechanism were studied.The results of scanning electron microscopy,atomic force microscopy,X-ray photoelectron spectroscopy and nano-hardness test showed that the nitrogendoped diamond like carbon coatings prepared at a target pulse duration of 60μs showed the sp3 bonding content of 33.9% with the hardness of 12.4 GPaand the root mean square roughness of 0.63 nm.With the increase in pulse duration to 90μs,the sp2 bonding increased,meanwhile the surface roughness increased.The results of potentiodynamic polarization indicated that the Nitrogen-doped diamond like carbon coating prepared at 60μs had best corrosion resistance with the corrosion current density of 7.65×10-8 A·cm-2.The effect of the target pulse duration on tribocorrosionbehaviour of the Nitrogen-doped diamond like carboncoating was investigated in Hank’s solution by a reciprocating tribometer equipped with a three-electrode electrochemical cell.The coatings at 60μs exhibited excellent tribocorrosion properties with high open circuit potential of 39 mV,low COF of 0.05 without pitting corrosion due to high corrosionresistance,low contact angel and dense microstructure.The results indicated that corrosion can be accelerated by friction,but it also affect the mechanical properties of the Nitrogen-doped diamond like carbon coatings.The increase in pulse duration to 90μs,leading to the reduction of sp3 bonds which can form a cross-linking structure.The degraded cross-linking structu

关 键 词：高功率脉冲磁控溅射 掺氮类金刚石薄膜 磨蚀 腐蚀 

分 类 号：TB383.2[一般工业技术—材料科学与工程] TQ163[化学工程—高温制品工业]