DLC在6500 V全压接晶闸管台面钝化中的应用  

Application of DLC for Termination Passivation of 6500 V Free-floating Thyristor

作　　者：王东东 王政英 高军 银登杰 WANG Dong-dong;WANG Zheng-ying;GAO Jun;YIN Deng-jie(Zhuzhou CRRC Times Electric Co.,Ltd.,Zhuzhou 412000,China)

机构地区：[1]株洲中车时代电气股份有限公司,湖南株洲412000

出　　处：《电力电子技术》2020年第2期113-116,共4页Power Electronics

基　　金：国家重点基础研究发展计划(973计划)(613262)。

摘　　要：结终端钝化材料是影响晶闸管耐压和耐压可靠性的关键因素之一。类金刚石膜(DLC)是一种优秀的钝化保护材料。在此介绍了平板电容器耦合式射频等离子体增强化学气相沉积(RF-PECVD)法,研究使用该方法在6500 V全压接晶闸管台面沉积DLC作钝化层。对DLC钝化的晶闸管进行常规测试和型式试验,重点关注耐压和耐压可靠性,均满足国标要求。DLC作结终端钝化材料具有降低PN结终端态密度、均匀电场和屏蔽外来电场、保持PN结终端热稳定、化学性质稳定和不会老化等优势。The material for terimination passivation is one of the key factors affecting blocking voltage and reliability of blocking voltage of thyristor.Diamond-like carbon(DLC)is an excellent passivation material.The plate capacitor coupling radio frequency plasma enhanced chemical vapor deposition(RF-PECVD)is introduced,the method is used to deposit DLC as passivation layer on 6500 V fully crimped thyristor desktop.Conventional test and type test of DLC passivated thyristor,focus on blocking voltage and reliability of blocking voltage,meet the requirements of national standard.DLC as passivation material for PN junction terminal has the advantages of reducing the state density of the PN junction terimal,uniform electrical field and shielding external field,maintaining the thermal stability and chemical stability of the PN junction terminal and not aging.

关 键 词：晶闸管 类金刚石膜 耐压可靠性 

分 类 号：TN32[电子电信—物理电子学]