新型车载MEMS加速度计的设计及性能优化  

Design and performance optimization of novel vehicle-mountedMEMS accelerometer

作　　者：李玲聪 张伟[1] 张学松[2] LI Lingcong;ZHANG Wei;ZHANG Xuesong(Key Laboratory of Sensor,Beijing Information and Technology University,Beijing 100101,China;China North Vehicle Research Institute,Beijing 100072,China)

机构地区：[1]北京信息科技大学传感器重点实验室,北京100101 [2]中国北方车辆研究所,北京100072

出　　处：《传感器与微系统》2020年第5期14-16,20,共4页Transducer and Microsystem Technologies

基　　金：北京市教育委员会科技计划重点资助项目(KZ201711232030);北京市传感器重点实验室开放基金资助项目。

摘　　要：为了能够实时检测车辆的姿态,设计了一种基于单片机(MSC1214)的MEMS加速度计。前端敏感元件感知加速度,由数字电路提取信号和输出,采用硬件均值滤波和软件卡尔曼滤波有效滤除随机噪声,提高信号曲线的平滑度及响应速度。针对零偏问题设计了软件消除零位误差算法,有效地减少零偏,数字输出收敛时间缩短了约16倍。针对系统零位漂移问题,设计了软件算法进行跟踪,有效地抑制了零位随时间的漂移问题。经过测试,加速度计能够实现载体在-60^+60 g n范围内的线加速度测量,滤波后的数字输出稳定性提高了8.77倍,并满足线性度≤1%FS。In order to detect the attitude of the vehicle in real-time,a MEMS accelerometer based on single chip microcomputer(MSC1214)is designed.Front-end sensitive component which senses accelaration is extracted and output by the digital circuit.The Kalman filtering and hardware average filtering are used to effectively filter out the random noise and improve the smoothness and response speed of signal curve.A software elimination zero error algorithm is designed,aiming at the zero offset problem,which effectively reduces the zero offset and shortens the digital output convergence time by about 16 times.Aiming at the zero drift problem of the system,a software algorithm is designed to track signal,which effectively suppresses the drift of zero position with time.After testing,the accelerometer can measure the linear acceleration of the carrier in the range of-60^+60 g n.The digital output stability after filtering is improved by 8.77 times,and the linearity is not more than 1%FS.

关 键 词：微机电系统(MEMS)加速度计 卡尔曼滤波 零位漂移抑制 线加速度 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TN379[自动化与计算机技术—控制科学与工程]