一种单频激光干涉仪非线性误差修正方法研究  

A Research on Correction Method of Nonlinear Errors for Homodyne Laser Interferometer

作　　者：金涛[1] 唐一揆 乐燕芬[1] 刘芳芳[2] 雷李华[2] JIN Tao;TANG Yi-kui;LE Yan-fen;LIU Fang-fang;LEI Li-hua(School of Optical-Electrical and Computer Engineering,University of Shanghai for Science and Technology,Shanghai 200093,China;Shanghai Institute of Measurement and Testing technology,Shanghai 201203,China)

机构地区：[1]上海理工大学光电信息与计算机工程学院,上海200093 [2]上海市计量测试技术研究院,上海201203

出　　处：《计量学报》2020年第6期676-681,共6页Acta Metrologica Sinica

基　　金：国家自然科学基金(51605297,51705324);上海市自然科学基金(16ZR1423000)。

摘　　要：针对单频激光干涉仪在位移测量中存在的非线性误差问题,研究了一种基于几何距离最小化的Heydemann修正算法,使用Jamin干涉仪和纳米位移台搭建了验证性实验。Jamin干涉仪是一种基于平面镜的差分结构单频干涉仪,当被测物体移动时,干涉仪输出两路相位差为90°的正交信号,这两路信号既用于Jamin干涉仪解算位移也用于验证论文的修正算法。实验结果表明,修正后的位移的拟合优度与Jamin干涉仪解算结果接近,决定系数约为1。相比Jamin干涉仪,在压电陶瓷同等驱动条件下,修正位移与电容传感器的位移的残差均较小,修正精度均高于Jamin干涉仪解算结果。A kind of Heydemann correction method by minimizing the geometric distance is proposed for elimination the nonlinear errors of a single frequency laser interferometer in the displacement measurement.The Jamin interferometer is used to make a verification experiment.Jamin interferometer is a homodyne interferometer which conducts a differential structure based on the plane mirror.The movement of measured object will make the interferometer output orthogonal signals shift with a phase difference of 90°which are both used for displacement correction of the Jamin interferometer and correction method proposed.The experiment results show that the goodness of fit of corrected displacement is similar with Jamin interferometer s which nearly equals 1.Compared with the result of Jamin interferometer,the residual errors between the corrected displacement and the displacement of capacitive sensor are much smaller under the same driving condition of piezoelectric ceramics,correction accuracy is better than the result of Jamin interferometer.

关 键 词：计量学 差分平面镜干涉仪 Heydemann修正 非线性误差 

分 类 号：TB921[一般工业技术—计量学]