采用硅流体芯片的气动位置控制系统特性研究  

Characteristics of the Pneumatic Position Control System with the Silicon Valve

作　　者：吴央芳[1] 周铖杰 夏春林[1] 王玉翰[1] 陆倩倩[1] WU Yang-fang;ZHOU Cheng-jie;XIA Chun-lin;WANG Yu-han;LU Qian-qian(Department of Mechatronic Engineering, Zhejiang University City College, Hangzhou, Zhejiang 310015;School of Mechanical Engineering, Changzhou University, Changzhou, Jiangsu 213164)

机构地区：[1]浙江大学城市学院机械电子工程系,浙江杭州310015 [2]常州大学机械工程学院,江苏常州213164

出　　处：《液压与气动》2020年第6期152-159,共8页Chinese Hydraulics & Pneumatics

摘　　要：对采用硅流体芯片的气动位置控制系统进行了建模、实验及仿真研究。在采用增量式PID控制的条件下,通过实验得到了系统对阶跃信号、三角波信号及正弦波信号的输出特性曲线,并分析了气源压力变化对控制系统输入输出特性影响较大的原因。当气源压力为0.7 MPa时,系统阶跃响应控制精度最高,进入稳态后误差小于0.077 mm。当气源压力为0.2 MPa时,系统对2 Hz的正弦信号可以较好的跟随。利用AMESim软件对系统进行了仿真研究,仿真结果表明,增加芯片个数可以减小阶跃响应的上升及下降时间,对滞回特性也有一定的改善。The modeling,experiment and simulation of the pneumatic position control system with the silicon valve are studied in this paper.Under the condition of the incremental PID control,the output characteristic curves of the step signal,triangle signal and sinusoidal signal are obtained by experiment.And the reason that the change of the air supply pressure has a great influence on the input and output characteristics of the control system is analyzed.When the air supply pressure is 0.7 MPa,the step response control accuracy of the system is the highest,and the error is less than 0.077 mm after entering the steady state.When the air supply pressure is 0.2 MPa,the system can follow the sinusoidal signal of 2 Hz well.The system is simulated by the AMESim software.And the simulation results show that increasing the number of the silicon valve can reduce the rise and fall time of the step response and improve the hysteresis characteristics of the system.

关 键 词：硅流体芯片 气动位置控制系统 特性研究 

分 类 号：TH138.7[机械工程—机械制造及自动化]