磁控溅射离子镀金装饰膜的研究  

Resear ch on Gold Decorative Film by Magnetr on Sputter Ion Plating

作　　者：孔晶 陈正件 袁菊懋 刘凌雯 余明远 廖雅 张嘉恒 KONG Jing;CHEN Zheng-jian;YUAN Ju-mao;LIU Ling-wen;YU Ming-yuan;LIAO Ya;ZHANG Jia-heng(Zhuhai Institute of Advanced Technology Chinese Academy of,Science,Zhuhai 519085,Guangdong,China;School of Material Science and Engineering,Harbin Institute of Technology,Shenzhen 518055,Guangdong,China)

机构地区：[1]珠海中科先进技术研究院有限公司,广东珠海519085 [2]哈尔滨工业大学(深圳)材料科学与工程学院,广东深圳518055

出　　处：《合成材料老化与应用》2020年第3期59-61,共3页Synthetic Materials Aging and Application

摘　　要：采用磁控溅射离子镀技术在316不锈钢表面制备TiN层和Au层,TiN层的厚度分别为0.620μm、0.997μm和1.389μm,反应沉积时间分别为60min、100min和140min,Au层的厚度均为0.13μm左右。测试了镀金层的镀层表面形貌、色泽、耐腐蚀性能和耐磨性能。结果表明,镀膜的反应沉积时间不同时,镀层表面均较致密,中间层TiN层的厚度对颜色没有明显的影响,镀层的耐腐蚀性和耐摩擦性能良好。TiN and gold coating was prepared on the surface of 316 stainless steel by magnetron sputter ion plating.The thickness of TiNas an interlayer were 0.620μm,0.997μm and 1.389μm respectively,and the deposition time of coating reaction were 60min,100min and 140min respectively.The thickness of Au(as surface layer)were all about 0.13μm.Morphology features,chromatic value,corrosion resistance and friction resistance of the gold coating were tested.The results showed that surface of coatings were all compact at different deposition time.There was no obvious influence to surface color when the thickness of TiN(as an interlayer)was different.The gold coatings prepared by magnetron sputter ion plating showed excellent corrosion resistance and friction resistance.

关 键 词：磁控溅射 装饰膜 表面形貌 色度值 耐腐蚀性能 耐摩擦性能 

分 类 号：TQ153.2[化学工程—电化学工业]