一种自适应安装的高精度图像式角位移测量装置  

A high precision image angular displacement measurement device with self-adaptive installation

作　　者：于海[1] 万秋华[1] 孙莹[1] 卢新然[1] 贾兴丹 YU Hai;WAN Qiu-hua;SUN Ying;LU Xin-ran;JIA Xing-dan(Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033 [2]中国科学院大学,北京100049

出　　处：《中国光学》2020年第3期510-516,共7页Chinese Optics

基　　金：国家自然科学基金资助项目(No.51605465);吉林省科技发展计划资助项目(No.20180520184JH)。

摘　　要：采用图像探测器的角位移测量技术可实现高精度高分辨力角位移测量。为提高角位移测量装置的鲁棒性,本文设计了一种自适应安装的高精度图像式角位移测量装置。其装调过程非常简便,且可以保证在标定光栅存在偏心时具有高分辨力和高精度测量输出。首先,提出了基于双线阵图像传感器的测角装置设计原理,并设计了单圈绝对式标定光栅。然后,采用基于质心算法的高分辨力细分算法进行细分,并采用双线阵图像传感器对测角误差进行误差补偿。最后,设计实验装置测试自适应安装的性能。实验结果表明,当标定光栅的偏心度在±1 mm以内时,所设计装置可以实现高精度和高分辨力的角位移测量。本文所设计的装置可以在标定光栅存在±1 mm的安装偏心时保证输出精度,为小型角位移测量装置适应性的提高给出了解决方案。The angular displacement measurement technology based on image detector is a hot research to realize high-precision and high-resolution angular displacement measurement.In order to improve the robustness of the angular displacement measuring devices,a high precision image displacement measurement device with self-adaptive installation techniques is designed in this paper.The installation and adjustment processes are very simple,and high resolution and high precision measurement output can be guaranteed in the presence of eccentricity in the calibration grating.Firstly,the angle measurement device using dual linear imaging sensors is proposed and a single-ring absolute grating is designed.Then,a high-resolution subdivision algorithm based on a centroid algorithm is used to subdivide the image,and dual linear image sensors are used to compensate for the angle measurement error.Finally,an experimental device is designed to test the performance of the adaptive installation.Experiments show that when the eccentricity of the grating is within±1 mm,the designed device can achieve highly precise angular displacement measurements with high resolution.The device designed in this paper guarantee the output accuracy when the grating has an installation eccentricity of±1 mm,which lays a foundation for improving the adaptability of small angular displacement measuring devices.

关 键 词：角位移测量 误差补偿 双图像探测器 自适应安装 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]