集成电路测试系统的测量分析MSA方法  

MSA Method for Measurement and Analysis of Integrated Circuit Test System

作　　者：李建超 钱威成 Li Jianchao;Qian Weicheng(Wuxi Zhongwei Tengxin Electronics Co.,Ltd,214000,Jiangsu,China)

机构地区：[1]无锡中微腾芯电子有限公司,江苏214000

出　　处：《集成电路应用》2020年第6期30-31,共2页Application of IC

基　　金：江苏省科技企业科技创新课题项目。

摘　　要：分析表明,测试质量和测试系统本身的一些特性有着非常密切的关系。要想使得测试结果的精确性更高,就必须对测试系统本身进行详细的分析与判定。必须做MSA,但是由于MSA的分析方法相对来说比较复杂。由于集成电路本身的一些特性,其测试系统的情况也非常特殊和复杂。如果在测试的过程中完全照搬MSA方法应用于集成电路的测试系统分析,将会非常不符合实际情况。阐述集成电路测试系统MSA工作中遇到的困难与解决方案。The analysis shows that the test quality is closely related to some characteristics of the test system itself.In order to make the test results more accurate,we must analyze and judge the test system in detail.MSA must be done,but the analysis method of MSA is relatively complex.Because of some characteristics of integrated circuit,its test system is very special and complex.If the MSA method is applied to IC test system analysis in the process of test,it will be very inconsistent with the actual situation.This paper describes the difficulties and solutions encountered in the work of integrated circuit test system MSA.

关 键 词：集成电路制造 测试系统 MSA分析 

分 类 号：TN405[电子电信—微电子学与固体电子学] TN407