环状角度阵列探测器的设计  

Design of Ring Angle Array Detector

作　　者：蔡魏威 CAI Weiwei(School of Physics and Information Engineering,Fuzhou University,FuJian 350116,China)

机构地区：[1]福州大学物理与信息工程学院,福建350116

出　　处：《集成电路应用》2020年第4期76-77,共2页Application of IC

摘　　要：设计一种霍尔角度传感器前端探测头。通过Silvaco TCAD软件进行仿真,利用霍尔器件进行对称式堆叠,形成环状垂直霍尔阵列器件。它能实现对平面内多个磁场方向进行侦测,输出不需要额外的ADC电路。整体阵列结构采用单颗传感器集成于芯片内部,相比于传统水平分立式传感器的霍尔测控芯片,减少了传感器的使用数量以及封装难度。The paper designs a front-end detection head of a Hall angle sensor,which is simulated by Silvaco TCAD software.Hall devices are used for symmetrical stacking to form a circular vertical Hall array device.It can detect multiple magnetic field directions in the plane,and the output does not require additional analog-to-digital conversion circuits.The overall array structure uses a single sensor integrated inside the chip.Compared with the Hall measurement and control chip of the traditional unipolar horizontal discrete sensor,the number of sensors and the packaging difficulty are reduced.

关 键 词：磁性传感器 垂直霍尔器件 角度传感器 电压灵敏度 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]