电弧离子镀Cr1-xAlxN硬质薄膜的成分、结构与性能  

Composition,Structure and Properties of the Cr1-xAlxN Hard Films Deposited by Arc Ion Plating

作　　者：莫亚杰 王明磊 程玮杰 林国强[1,2] MO Yajie;WANG Minglei;CHEN Weijie;LIN Guoqiang(Material Science and Engineering School,Dalian University of Technology,Dalian 116024,China;Key Laboratory for Material Modification by Laser,Ion and Electron Beams,Ministry of Education,Dalian University of Technology,Dalian 116024,China)

机构地区：[1]大连理工大学材料科学与工程学院,大连116024 [2]大连理工大学三束材料改性教育部重点实验室,大连116024

出　　处：《无机材料学报》2020年第6期675-681,共7页Journal of Inorganic Materials

基　　金：国家自然科学基金(51271047);国家重点研发计划课题(2016YFB0101318)。

摘　　要：采用电弧离子镀的分离靶弧流调控技术在硬质合金基体上制备了4组不同Al含量的Cr1-xAlxN硬质薄膜,采用SEM、XPS、GIXRD、Nanoindenter及划痕仪分别表征了薄膜的形貌、成分、相结构和力学性能。结果表明:4组薄膜厚度分别为1.28、1.42、1.64和1.79μm;成分x随着Al靶的弧流相对增大而增大,分别为x=0.41、0.53、0.64和0.73;相结构与成分密切相关,当x=0.41时,薄膜呈单一的c-(Cr,Al)N相;而当x≥0.53时,则由c-(Cr,Al)N相和hcp-AlN相混相构成;随着Al含量增加,晶粒尺寸先减小后增大,在x=0.64时达到最小值8.9 nm;相应地硬度则先增大后减小,在x=0.64时达到峰值35.3 GPa;4组Cr1-xAlxN薄膜的膜基结合良好,结合力均在60 N以上。综合测试结果发现,当x=0.53时,Cr1-xAlxN薄膜的韧性最佳,弹性恢复系数最高为57.4%,同时兼具较高的硬度34.7 GPa,此时薄膜具有最佳的综合性能。Four groups of Cr1-xAlxN films with different Al contents were deposited on ultrafine cemented carbide substrates by arc ion plating,their morphology,composition,phase structure and mechanical property were investigated via field emission scanning electron microscope,X-ray photo electron spectrometry,grazing incidence X-ray diffraction,nanoindenter and scratch tests.The results revealed that the thickness of the films is 1.28,1.42,1.64 and 1.79μm and the aluminum concentration x is 0.41,0.53,0.64 and 0.73,respectively,increased with incremental current of Al target.There is a close relationship between phase structure and composition.Films performed single centered cubic B1 structure when x is 0.41,however,demostrated mixed structure of c-(Cr,Al)N and hcp-AlN when x≥0.53.The dimensions of grains obtained a minimum value of 8.9 nm near x=0.64,as Al content increasing,while the variation in hardness followed an increase-decrease pattern,reaching peak values of 35.3 GPa at x=0.64.The films performed pretty adhesion strength and their critical loads were all over 60 N.Based on all test results,the Cr1-xAlxN films exhibited the best combination properties including high hardness of 34.7 GPa,the highest elastic recovery coefficient of 57.4%and the best toughness while x is 0.53.

关 键 词：电弧离子镀 CRALN 硬质薄膜 成分 相结构 力学性能 

分 类 号：TQ174[化学工程—陶瓷工业]