氮气流量比对CrN涂层结构及摩擦磨损性能的影响  

Effect of Nitrogen Flow Rate on Structure and Tribological Properties of CrN Coatings

作　　者：卢帅 王砚军[1] 孟德章 高鹏远 LU Shuai;WANG Yanjun;MENG Dezhang;GAO Pengyuan(School of Mechanical Engineering,University of Jinan,Jinan Shandong 250022,China)

机构地区：[1]济南大学机械工程学院,山东济南250022

出　　处：《润滑与密封》2020年第6期90-94,共5页Lubrication Engineering

基　　金：国家自然科学基金项目(51275208);山东省重点研发计划项目(2016GGX10202).

摘　　要：采用直流磁控溅射技术在不同氮气流量比下在YG6基体上制备CrN涂层,通过X射线衍射仪(XRD)、扫描电子显微镜(SEM)及能谱仪(EDS)分析涂层相组成、涂层形貌与涂层元素成分,利用数字式显微硬度仪、划痕仪测定涂层硬度与涂层结合力,在摩擦磨损试验机考察涂层摩擦学性能。结果表明:氮气流量比(氮气流量占气体总流量的比例)为20%、30%时,CrN/YG6涂层结构相对疏松,呈柱状生长;氮气流量比为40%、50%时,CrN/YG6涂层结构较致密,呈三角颗粒状生长;随氮气流量比增大,涂层硬度先增大后减小,当氮气流量比为40%时达到最大值HV1752.5;CrN涂层的摩擦因数随氮气流量比的增大变化不大,但磨损率先增大后减小再增大,当氮气流量比为40%时达到最小值2.03×10^-8 mm^3/(N·mm)。研究表明,当氮气流量比为40%时,所制备的CrN涂层具有良好的综合性能。CrN coating was produced on YG6 substrate by DC magnetron sputtering at different nitrogen flow ratios.The morphology and element composition of the coating were analyzed by XRD,SEM and EDS,the hardness and adhesion of the coating were measured by digital microhardness tester and scratch tester,and the tribological properties of the coatings were investigated on the friction and wear testing machine.The results show that the structure of CrN/YG6 coating is relatively loose and presents columnar growth when nitrogen flow ratio(nitrogen flow in proportion to total gas flow)is 20%and 30%,and relatively compact and grows like triangular particles when the nitrogen flow ratio is 40%and 50%.With the increase of nitrogen flow ratio,the hardness of the coating is increased firstly and then decreased,and reaches the maximum value of HV1752.5 when the nitrogen flow ratio is 40%.With the increase of nitrogen flow ratio,the friction coefficient of the coating changes little,while the wear is increased firstly and then decreased and then increased,which reaches a minimum of 2.03×10^-8 mm^3/(N·mm)when the nitrogen flow ratio is 40%.It is found that the CRN coating has good comprehensive properties when the nitrogen flow rate is 40%.

关 键 词：直流磁控溅射 CRN涂层 氮气流量比 微观形貌 摩擦磨损 

分 类 号：TH117.1[机械工程—机械设计及理论]