长光栅光刻车间气流组织数值模拟研究  

Numerical Simulation of Air Distribution in Long Grating Lithography Workshop

作　　者：孙栋 张萍[2] 杨旭东[3] 尹宏[3] SUN Dong;ZHANG Ping;YANG Xudong;YIN Hong(College of Mechanical Engineering,Guizhou Institute of Technology,Guiyang Guizhou 550003;College of Mechanical Engineering,Guizhou Minzu University,Guiyang Guizhou 550025;College of Mechanical Engineering,Guizhou University,Guiyang Guizhou 550025)

机构地区：[1]贵州理工学院机械工程学院,贵州贵阳550003 [2]贵州民族大学机械工程学院,贵州贵阳550025 [3]贵州大学机械工程学院,贵州贵阳550025

出　　处：《智能建筑与工程机械》2020年第1期52-54,58,共4页Intelligent Building and Construction Machinery

基　　金：贵州省科技计划项目《施肥机械智能控制模块与电机技术研究》黔科合支撑[2019]2024号。

摘　　要：长光栅的光刻制造工艺是一个复杂的精密制造过程,良好的环境条件有利于提高产品质量,本文通过CFD方法模拟分析某规格长光栅光刻车间内由空调通风所形成的空气速度场及温度场,确定满足制造工艺要求的空调参数,同时研究送风温度及送风速度对车间气流组织的影响,实现有效减少试验成本及试验时间,为实际生产提供理论依据的目的。The lithography process of long grating is a complex and precise manufacturing process,and good environmental conditions are conducive to improving product quality.In this paper,the air velocity field and temperature field formed by air conditioning and ventilation in a long grating lithography workshop are simulated and analyzed by CFD method,and the air conditioning parameters that meet the requirements of manufacturing process are determined.At the same time,the effects of air supply temperature and air supply speed on the airflow group of workshop are studied The effect of weaving can effectively reduce the cost and time of experiment and provide theoretical basis for actual production.

关 键 词：光刻 CFD 速度场 温度场 

分 类 号：TN253[电子电信—物理电子学]