利用激光跟踪仪测量大口径非球面几何参数  

A Method Measuring Geometric Parameters for Large-aperture Aspheric Surface with the Laser Tracker

作　　者：庞哲 宗肖颖[1] 杜建祥[1] PANG Zhe;ZONG Xiaoying;DU Jianxiang(Beijing Institute of Space Mechanics&Electricity,Beijing 100094,China)

机构地区：[1]北京空间机电研究所,北京100094

出　　处：《航天返回与遥感》2020年第3期47-59,共13页Spacecraft Recovery & Remote Sensing

基　　金：国家重大科技专项工程。

摘　　要：在利用无像差点或补偿器测量非球面反射镜顶点曲率半径和二次非球面系数的方法中,一般采用测量杆来测量干涉仪会聚点到辅助镜或补偿器的距离以及辅助镜或补偿器到非球面顶点的距离。对于大口径非球面反射镜,由于顶点曲率半径长,辅助镜或补偿器到非球面顶点的距离达到几米的量级。为了提高测试精度,文章对offner补偿器面形测试光路中利用激光跟踪仪测量大口径非球面反射镜顶点曲率半径和二次非球面系数的方法进行了研究,介绍了该方法的测量原理、测量模型的建立、轴对称非球面反射镜顶点坐标的拟合算法及其它数据处理方法,并对顶点曲率半径4m量级、直径1.5m的轴对称非球面反射镜进行了测试实验,给出了测试结果和测试误差分析,顶点曲率半径的测试误差为±0.051mm,二次非球面系数测试误差为±0.000 11。结果表明,利用激光跟踪仪测量大口径非球面反射镜几何参数具有在工程上容易实现并可提高测试精度等优点。Among the methods measuring the vertex radius and the aspheric coefficient of aspherical mirrors using the aberration-free point or the offner compensator,the distance between the interferometer convergence point(or the aspheric vertex)and the assistant lens(or the compensator),is generally measured by a measuring rod.For large diameter aspheric mirrors,because the vertex radius is very long,the distance from the assistant lens or the compensator to the aspheric vertex is on the order of a few meters.In order to improve the measuring accuracy,a method measuring the vertex radius and aspheric coefficient for large diameter aspheric mirrors by the laser tracker is studied in this paper,including the modeling method,the algorithm fitting vertex coordinates of axisymmetric aspheric mirrors,and other data processing methods.Experiments are performed on an axisymmetric aspheric mirror with curvature radius of 4 m on the vertex and diameter of 1.5 m.The test results and error analysis are given.The test error is±0.051 mm for the vertex radius,and±0.00011 for the aspheric coefficient.The results show that the proposed method has many advantages in improving the test accuracy,and is easy to implement in engineering.

关 键 词：顶点曲率半径 二次非球面系数 几何参数测量 非球面检测 激光跟踪仪 长焦距相机 航天遥感 

分 类 号：O439[机械工程—光学工程]