基于FBG温度解耦的光纤法布里-珀罗高温压力传感器  

Fiber-Optic Fabry-Perot Pressure Sensor Based on FBG Temperature-Decoupling for High-Temperature Applications

作　　者：陈宝杰 刘佳[1,2] 贾平岗[1,2] 梁庭[1,2] 洪应平[1,2] 熊继军[1,2] CHEN Baojie;LIU Jia;JIA Pinggang;LIANG Ting;HONG Yingping;XIONG Jijun(Science and Technology on Electronic Test and Measurement Laboratory,North University of China,Taiyuan 030051,China;Key Laboratory of Instrumentation Science and Dynamic Measurement,Ministry of Education,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学电子测试技术国家重点实验室,山西太原030051 [2]中北大学仪器科学与动态测试教育部重点实验室,山西太原030051

出　　处：《测试技术学报》2020年第4期321-326,共6页Journal of Test and Measurement Technology

基　　金：国家自然科学基金资助项目(51935011);山西省自然科学基金资助项目(201901D111160);山西省“1331项目”重点学科建设资助项目。

摘　　要：本文提出了一种基于光纤布拉格光栅(FBG)温度解耦方法的光纤法珀(FP)压力传感器,该传感器采用低温共烧陶瓷(LTCC)技术实现批量化制作.通过在膜片式压力传感器的基础上集成光纤布拉格光栅(FBG),实现温度、压力双参数测量;提出温度解耦方法,对传感器进行温度补偿及压力测量结果的修正.实验结果表明,在20~300℃的温度范围内,FBG温度传感器的灵敏度为0.012 nm/℃,在160 kPa的压力范围内,压力测量灵敏度约为0.1μm/kPa,3次重复实验的重复性误差和非线性误差分别约为5.6%和1.3%,温度系数为0.018μm/℃,压力灵敏度随温度变化为0.283 nm/(kPa·℃),同时,采用温度解耦方法,得到压力计算值与真实值最大偏差小于2.5 kPa.An optical fiber Fabry-Perot(FP)pressure sensor based on fiber Bragg grating(FBG)temperature-decoupling method for high temperature applications is proposed.The sensor heads are mass-produced by Low Temperature Co-fired Ceramic(LTCC)technology.A FBG has integrated on the diaphragm-based pressure sensor to simultaneous measurement of temperature and pressure.A temperature decoupling method is proposed to realize temperature compensation and pressure measurement result correction.The experimental results show that the sensitivity of the FBG temperature sensor is 0.012 nm/℃in the temperature range of 20~300℃.The pressure sensitivity of approximately 0.1μm/kPa at room temperature in the pressure range up to 160 kPa.The repeatability error and non-linear error of three repeatable experiments are approximately 5.6%and smaller than 1.3%,respectively.The temperature coefficient and pressure-sensitivity changes with temperature are 0.018μm/℃and 0.283 nm/(kPa·℃)in the temperature range of 20~300℃.By using the temperature-decoupling method,the maximum deviation between the calculated pressure and the true value is less than 2.5 kPa.

关 键 词：光纤法珀 光纤布拉格光栅 压力传感器 温度传感器 低温共烧陶瓷 

分 类 号：TN253[电子电信—物理电子学]