氧化铁刻蚀金刚石表面形貌的表征及形成机理  

Characterization and Formation Mechanism of Surface Morphology on Diamond Etched by Fe2O3 Powder

作　　者：肖长江[1] 窦志强 朱振东 XIAO Changjiang;DOU Zhiqiang;ZHU Zhendong(School of Material Science&Engineering,Henan University of Technology,Zhengzhou 450001,China)

机构地区：[1]河南工业大学材料科学与工程学院,郑州450001

出　　处：《材料导报》2020年第14期14045-14050,共6页Materials Reports

基　　金：郑州市科技局自然科学项目(20150246).

摘　　要：为了系统研究不同温度下氧化铁刻蚀金刚石表面的形貌及形成机理,以人造金刚石为刻蚀材料,以氧化铁作为刻蚀剂,先将金刚石洗净,然后将金刚石与氧化铁以质量比为1∶5混合均匀、压实,用氮气作为保护气氛,在650~850℃下用氧化铁刻蚀金刚石单晶表面。再用扫描电子显微镜及其3D重建技术、热重分析、X射线衍射和拉曼光谱等方法对刻蚀后金刚石单晶不同晶面的表面形貌、表面粗糙度、物相组成和刻蚀机理进行了表征与分析。首次用3D重建技术对刻蚀后金刚石不同晶面的形貌进行了立体观测,用铜基结合剂金刚石试样的抗弯强度来评估刻蚀对金刚石与结合剂间结合力的影响。结果表明:氧化铁在不同温度下均能有效刻蚀金刚石单晶,且对不同晶面的刻蚀程度和形貌是各向异性的;当刻蚀温度为650℃时,氧化铁对金刚石单晶已有一定的刻蚀;随温度的升高,刻蚀加剧;在相同条件下,金刚石单晶的{100}面刻蚀程度比{111}面严重,{100}面表面粗糙度S a从0.84μm升至3.73μm,{111}面表面粗糙度S a从0.77μm升高至2.01μm。刻蚀后,金刚石单晶的不同晶面形貌由金刚石本身的原子排列决定,随着刻蚀温度从650℃升至850℃,金刚石{100}面刻蚀坑从四边形变为八边形,{111}面由轻微的点状变为三棱锥形凸起。氧化铁对金刚石单晶的刻蚀机理是金刚石的氧化过程。刻蚀后,铜基结合剂金刚石试样的抗弯强度有较大的提高。In order to systematically study the characterization and formation mechanism of surface morphology on diamond etched by Fe2O3 powder at different temperatures,using synthetic diamond as etching material and Fe2O3 powder as etching agent,the diamond was washed first,then Fe2O3 was mixed with diamond in a weight ratio of 5∶1 by milling in a ball-mill and tightly compacted,finally,the surface of diamond single crystal was etched by Fe2O3 at 650—850℃with nitrogen as protective atmosphere respectively.The surface morphology,surface roughness,phase composition and etching mechanism of etched diamond single crystals were characterized and analyzed by means of scanning electron microscope and 3D reconstruction,thermogravimetric analysis,X-ray diffraction and Raman spectroscopy.Moreover,the morphology of different crystal planes of etched diamond was observed by 3D rescontruction technique for the first time,and the bending strength of Cu-matrix bonded diamond sample was prepared to evaluate the effect of etching on the bonding force between diamond and metal matrix.The results show that Fe2O3 can etch diamond single crystal well at different temperatures,and the degree and morphology of etching on different crystal planes are anisotropic,and when the etching temperature is 650℃,Fe2O3 has etched diamond single crystal to a certain extent.The etching rate of{100}and{111}plane increases as the temperature increasing,and that{100}plane was etched more severely than{111}plane under the same conditions.The surface roughness S a of{100}plane increases from 0.84μm to 3.73μm,while the surface roughness S a of{111}plane increases from 0.77μm to 2.01μm.After etching,the surface morphology of the etched diamond reflect the arrangement of carbon atoms on the corresponding plane.When the etching temperature rises from 650℃to 850℃,the etched pit of{100}plane changes from quadrilateral to octagonal,and the{111}plane is slightly punctate into a triangular conical bulge.The mechanism of Fe2O3 etching diamond single crysta

关 键 词：金刚石单晶 氧化铁 温度 各向异性刻蚀 表面粗糙度 机理 

分 类 号：TG732[金属学及工艺—刀具与模具]