硅基液晶(LCoS)微显示技术  

Micro-display technique of liquid crystal on silicon(LCoS)

作　　者：梁宇华[1] 朱樟明[1] LIANG Yuhua;ZHU Zhangming(School of Microelectronics,Xidian University,Xi’an 710071,China)

机构地区：[1]西安电子科技大学微电子学院,西安710071

出　　处：《微纳电子与智能制造》2020年第2期73-79,共7页Micro/nano Electronics and Intelligent Manufacturing

基　　金：陕西省重点研发计划(2020GY-017);国家杰出青年科学基金项目(61625403);中国博士后科学基金(2019M653553);中央高校基本科研业务费专项资金(XJS201105)资助。

摘　　要：由于科技的发展和不同应用需求的提出,在过去的几十年时间内,新型显示技术层出不穷。但是,在微显示领域,由于可以在成本、显示性能、功耗和屏幕尺寸等方面实现性能的综合优化,硅基液晶(liquid crystal on silicon,LCoS)显示技术具有其独有的优势。LCoS微显示基于集成电路工艺实现,需高度集成电路和显示器件。随着集成电路技术的发展以及加工精度的提高,LCoS有望在保证其显示性能的前提下进一步实现显示微缩化,并成为微显示领域的主流。阐述了LCoS显示技术的原理和特性,以及国内外LCoS显示技术的发展现状,为LCoS显示从架构、方案及电路设计等方面提供了技术参考。On account of the development of science and technology,together with the demand of different applications,several display technologies have emerged in the past decades.However,in the field of micro-display,liquid crystal on silicon(LCoS)display technology has its unique advantages due to the ability of comprehensive optimization of performance in terms of the cost,the display performance,the power consumption and the screen size.The micro display realized with LCoS needs to be fabricated by integrated circuit process,and requires highly integrated circuits and display components.With the development of semiconductor technology and the improvement of fabricating,LCoS is expected to realize the display miniaturization further on the premise of guaranteeing its display performance,and becomes the mainstream in the domain of the micro display.The principle and characteristics of LCoS display technology are described,as well as the development status of LCoS display technology at home and abroad,which provides technical reference for LCoS display from the aspects of architecture,scheme and circuit design.

关 键 词：半导体工艺 硅基液晶 微显示 高分辨率 

分 类 号：TN4[电子电信—微电子学与固体电子学]