Controlled Movements in Superlubric MEMS  

作　　者：Cangyu Qu Xiaojian Xiang Ming Ma Quanshui Zheng 

机构地区：[1]Institute of Superlubricity Technology,Research Institute of Tsinghua University in Shenzhen,Shenzhen 518057,Guangdong,China [2]Center for Nano and Micro Mechanics,Tsinghua University,Beijing 100084,China [3]State Key Laboratory of Tribology&Department of Mechanical Engineering,Tsinghua University,Beijing 100084,China [4]Department of Engineering Mechanics,Tsinghua University,Beijing 100084,China

出　　处：《Journal of Harbin Institute of Technology(New Series)》2020年第3期45-57,共13页哈尔滨工业大学学报（英文版）

基　　金：National Natural Science Foundation of China(Grant Nos.11572173,11890671,51961145304 and 11921002);the National Key Basic Research Program of China(Grant No.2013CB934200);the Cyrus Tang Foundation(Grant No.202003);the Beijing Municipal Science&Technology Commission(Grant No.Z151100003315008);the Tsinghua University Initiative Scientific Research(Grant Nos.2014Z01007 and 2012Z01015);the State Key Laboratory of Tribology Tsinghua University Initiative Scientific Research(Grant No.SKLT2019D02).

摘　　要：Structural superlubricity(SSL)refers to a state where the friction and wear between two directly contacted solid surfaces are virtually zero.The realization of microscale SSL in 2012 rapidly explored SSL technologies which hold great potential in the development of reliable and energy⁃efficient micro devices.A key to a successful superlubric device is to control the movements of the superlubric slider.To solve this challenge,here two general principles are shown to guide and control the motion of the slider,i.e.,by minimization of interfacial energy and minimization of electrostatic energy.When the shapes of the slider and substrate are designed appropriately,the excess interfacial energy of the contact⁃pair provides restoring and constraining forces to the slider.Similarly,tunable driving and constraining forces are enabled by the electric fields induced by the electrodes buried in the substrate.These concepts are demonstrated on the design of a superlubric resonator whose natural frequency of the lateral translational mode is well⁃defined and unfavorable rotation is constrained.The above design principles should be applicable to superlubric devices in general and help the development of future applications of structural superlubricity.

关 键 词：structural superlubricity MEMS RESONATOR controlled movement 

分 类 号：TH117.1[机械工程—机械设计及理论]