Hybrid femtosecond laser three-dimensional micro-and nanoprocessing:a review  

作　　者：Koji Sugioka 

机构地区：[1]RIKEN Center for Advanced Photonics,Wako,Saitama 351-0198,Japan

出　　处：《International Journal of Extreme Manufacturing》2019年第1期52-63,共12页极端制造（英文）

摘　　要：The extremely high peak intensity associated with ultrashort pulse width of femtosecond(fs)lasers enabled inducing nonlinear multiphoton absorption in materials that are transparent to the laser wavelength.More importantly,focusing the fs laser beam inside the transparent materials confined the nonlinear interaction to within the focal volume only,realizing three-dimensional(3D)micro/nanofabrication.This 3D capability offers three different processing schemes for use in fabrication:undeformative,subtractive,and additive.Furthermore,a hybrid approach of different schemes can create much more complex 3D structures and thereby promises to enhance the functionality of the structures created.Thus,hybrid fs laser 3D microprocessing opens a new door for material processing.This paper comprehensively reviews different types of hybrid fs laser 3D micro/nanoprocessing for diverse applications including fabrication of functional micro/nanodevices.

关 键 词：femtosecond laser 3D processing hybrid processing MICRODEVICE NANODEVICE 

分 类 号：TN249[电子电信—物理电子学] TP391.73[自动化与计算机技术—计算机应用技术]