溅射离子泵抽气单元放电及离子输运仿真  

Simulation Investigation on Discharge and Ion Transport of Pumping Units for Sputter Ion Pumps

作　　者：宁久鑫 黄海龙[1] 王晓冬[1] 孙浩 NING Jiu-xin;HUANG Hai-long;WANG Xiao-dong;SUN Hao(School of Mechanical Engineering&Automation,Northeastern University,Shenyang 110819,China)

机构地区：[1]东北大学机械工程与自动化学院,辽宁沈阳110819

出　　处：《东北大学学报（自然科学版）》2020年第7期962-967,共6页Journal of Northeastern University(Natural Science)

基　　金：国家重大科学仪器设备开发专项(2017YFF0105801).

摘　　要：基于有限元法,对溅射离子泵抽气单元内气体放电及离子输运过程进行了研究.采用商业软件COM SOL M ultiphysics将等离子体模块、磁场模块、带电粒子追踪模块进行耦合,计算得到阳极筒内电子密度的分布规律.研究了气体压强、阳极电压、磁场强度等参数对电子密度的影响,追踪了离子在不同压强下的运动轨迹,得到了离子对阴极板的入射角度和冲击能量.将仿真结果代入到理论抽速计算公式中,所得结果与实验数据进行对比,两者具有很好的一致性,验证了仿真模型的准确性.对离子泵结构设计和性能优化提供了一种适用方法.Based on the finite element method(FEM),the discharge and ion transport processes of the sputter ion pumping units were studied.The plasma module,the magnetic field module,and the charged particle tracking module were coupled by COMSOL Multiphysics.The distribution law of electron density in the anode cylinder was obtained.The effects of parameters such as pressure,anode voltage and magnetic field strength on electron density were investigated.The trajectories of the ions at different pressures were tracked,and the impact energy and angle of the ions to the cathode plates were obtained.The obtained parameters were then applied to the theoretical pumping speed calculation and the results were compared with the experimental pumping speed.They have good consistency and verify the accuracy of the simulation model,which provides a suitable method for structural design and performance optimization of sputter ion pumps.

关 键 词：溅射离子泵 离子输运 多物理场耦合 仿真分析 抽气速率 

分 类 号：TB752[一般工业技术—真空技术]