基于新型激光干涉仪的玻璃测厚实验装置  

Experimental Device for Glass Thickness Measurement Based on a Novel Laser Interferometer

作　　者：王晓娜[1] 陈珂 周新磊 陶鹏程 WANG Xiaona;CHEN Ke;ZHOU Xinlei;TAO Pengcheng(School of Physics,Dalian University of Technology,Dalian 116024,China;School of Optoelectronic Engineering and Instrumentation Science,Dalian University of Technology,Dalian 116024,China)

机构地区：[1]大连理工大学物理学院,大连116024 [2]大连理工大学光电工程与仪器科学学院,大连116024

出　　处：《实验科学与技术》2020年第3期134-139,共6页Experiment Science and Technology

基　　金：十三五国家科技重大专项科研任务(2016ZX05057006);辽宁省普通高等教育本科教学改革研究项目(201600126);大连理工大学实验室重点建设项目(2018006)。

摘　　要：设计了一种用于玻璃厚度测量的空间相位调制型激光干涉仪,该干涉仪主要由垂直腔面发射激光器(VCSEL),单模光纤和线阵电荷耦合器件(CCD)组成,玻璃上、下表面的反射光产生双光束干涉,生成的空间相位调制干涉图像被CCD探测,图像的空间频率与玻璃厚度成比例,厚度测量分辨率可以达到纳米量级。该玻璃测厚教学实验装置具有体积小和成本低等优势,涉及光学干涉、激光原理、光电探测、现场可编程门阵列(FPGA)、电子电路、虚拟仪器、数字信号处理等诸多内容,适合于高年级本科生的教学实验。A spatial phase modulation laser interferometer for glass thickness measurement is designed. The interferometer was mainly composed of a vertical cavity surface emitting laser(VCSEL), a single mode fiber and a linear array charge coupled device(CCD). The reflected lights from the two surfaces of the glass produced two-beam interference. The generated spatial phase modulated interference image was detected by the CCD. The spatial frequency of the image was proportional to the thickness of the glass.The thickness measurement resolution could reach the nanometer level. The glass thickness measuring experimental device has advantages such as small volume and low cost. It involves optical interference, laser principle, photoelectric detection, field programmable gate array(FPGA), electronic circuit, virtual instrument, digital signal processing. It is suitable for teaching experiments of senior undergraduates.

关 键 词：激光干涉仪 双光束干涉 玻璃测厚 线阵CCD LABVIEW 

分 类 号：TP274.4[自动化与计算机技术—检测技术与自动化装置]