飞秒激光微纳加工光纤功能器件研究进展  

Research Progress on Optical Fiber Functional Devices Fabricated by Femtosecond Laser Micro-Nano Processing

作　　者：李金健 刘一 曲士良[1] Li Jinjian;Liu Yi;Qu Shiliang(Department of Physics,Harbin Institute of Technology,Harbin,Heilongjiang 150001,China;Department of Optoelectronics Science,Harbin Institute of Technology at Weihai,Weihai,Shandong 264209,China)

机构地区：[1]哈尔滨工业大学物理学院,黑龙江哈尔滨150001 [2]哈尔滨工业大学(威海)理学院,山东威海264209

出　　处：《激光与光电子学进展》2020年第11期17-32,共16页Laser & Optoelectronics Progress

基　　金：国家自然科学基金(11874010)。

摘　　要：光纤功能器件具有体积小、灵敏度高、抗电磁干扰、抗腐蚀、易于集成复用等独特优势,在微机械结构、生物医疗、海洋探测、航空航天等领域有着巨大的应用前景。飞秒激光具有超窄的脉冲宽度,在与材料相互作用时能够有效地避免热效应,具有较高的加工精度,因此被广泛应用于光纤功能器件制备。目前,利用飞秒激光直写技术、飞秒激光双光子聚合技术和飞秒激光水击穿技术等已制备出稳定可靠的三维高分辨率微纳光纤功能器件。主要介绍了光纤光栅、光纤干涉仪、光波导等光纤功能器件的飞秒激光加工技术发展状况,展望了飞秒激光加工技术的应用前景。Optical fiber functional devices have huge application prospects in micromechanical structures,biomedical,ocean detection,aerospace,and other fields because of their unique advantages such as small size,high sensitivity,anti-electromagnetic interference,corrosion resistance,easy integration,and multiplexing.Femtosecond laser with ultra-narrow pulse widths can effectively avoid thermal effects and can achieve high-precision optical functional structures when interacting with materials,which has been used in fiber functional device manufacturing.At present,various three-dimensional micro-nano fiber functional devices with good stability and high resolution have been prepared by femtosecond laser direct writing technology,femtosecond laser two-photon polymerization technology,and femtosecond laser-induced water breakdown technology.Herein,we introduce the recent development of fiber grating,fiber interferometer,optical waveguide,and other micro-optical devices.Further,we analyze the future development directions and prospects of femtosecond laser micro-nano processing technology.

关 键 词：激光光学 飞秒激光 微纳加工 光纤传感 微流芯片 

分 类 号：TN256[电子电信—物理电子学]