面向机器人触觉的柔性压力传感器  

Flexible Pressure Sensor for Robotic Touch

作　　者：尚飞 胡潇然 张千 刘帅 向勇 SHANG Fei;HU Xiao-ran;ZHANG Qian;LIU Shuai;XIANG Yong(School of Materials and Energy,University of Electronic Science and Technology of China Chengdu 611731)

机构地区：[1]电子科技大学材料与能源学院,成都611731

出　　处：《电子科技大学学报》2020年第4期636-640,共5页Journal of University of Electronic Science and Technology of China

基　　金：部级基金。

摘　　要：机器人触觉传感器需要同时满足对受力大小进行精确感知以及对作用位置进行精准定位。该文采用等离子体原位极化工艺,在柔性电路板上制备了PVDF-TrFE压电薄膜。在PVDF-TrFE薄膜的制备中,以少量羟基磷灰石掺杂提高了PVDF的结晶性能,有利于β晶型的转化,进而提高了PVDF的压电系数,提升了PVDF对力的电学响应精度,从而提高了感知器件灵敏度。采用柔性PCB电路板制备柔性PVDF压电传感器,不仅可以对力的大小实现三维传感,而且能够对作用力的位置进行定位,从而可以应用于机器人触觉传感。Robotic touch sensors need to satisfy both accurately sense on the force and precisely position of the force.In this paper,PVDF-TrFE piezoelectric film was fabricated on a flexible circuit board through an insitu polarization method.The crystallinity of PVDF is improved by a small amount of hydroxyapatite doping,which is beneficial to the conversion ofβcrystal form,and thus increases the piezoelectric coefficients of PVDF.With the increased piezoelectric coefficient,the electrical response precision of PVDF to force is improved,and makes the PVDF-based pressure sensing device more sensible.The flexible PVDF piezoelectric sensor is fabricated by using a flexible PCB,which can not only realize three-dimensional sensing of the force level,but also locate the position of the force,so that it can be applied to the tactile sensing of the robot.

关 键 词：羟基磷灰石 压电系数 压电传感器 机器人触觉 

分 类 号：TB34[一般工业技术—材料科学与工程]