高温声表面波器件Pt电极的制备研究  

Study on platinum etching in SAW devices for high temperature application

作　　者：骆伟 郝文昌 郭伟龙 赵广宏 尹玉刚 LUO Wei;HAO Wenchang;GUO Weilong;ZHAO Guanghong;YIN Yugang(Beijing Research Institute of Telemetry,Beijing 100076,China)

机构地区：[1]北京遥测技术研究所,北京100076

出　　处：《遥测遥控》2020年第2期32-35,74,共5页Journal of Telemetry,Tracking and Command

基　　金：国家自然科学基金(U1837210)。

摘　　要：针对高温声表面波(SAW)器件中的Pt电极制备需求,采用电感耦合等离子体干法刻蚀工艺实现Pt电极的干法刻蚀。通过采用纯Ar气源,研究不同ICP功率/RF功率下Pt电极的刻蚀,采用优化的刻蚀参数实现SAW中Pt叉指电极的制备。针对Pt溅射刻蚀中出现的再沉积问题,分析沉积物对电极制备的影响,通过后处理实现沉积物的去除,实现高温SAW器件的制备。Dry etching of platinum electrodes is carried out by inductively coupled plasma(ICP)methods as required in Surface Acoustic Wave(SAW)devices for high temperature applications.Only with argon gas,platinum etching characteristics with different ICP power/RF power are investigated,the platinum electrodes in SAW devices are obtained by optimized etching conditions.Moreover,redeposition and its influences on the electrodes fabrication are revealed,which results from sputtering effect in platinum etching,and post processing is employed to remove it in the final fabrication of SAW devices.

关 键 词：声表面波 叉指换能器 Pt刻蚀 电感耦合等离子体 

分 类 号：TN305.92[电子电信—物理电子学]