FAIMS气体传感器的特性研究  

Study on Characteristics of FAIMS Sensor

作　　者：赵东杰 游思晴[1] 杨玺[1] 马廷伟 周明 ZHAO Dongjie;YOU Siqing;YANG Xi;MA Tingwei;ZHOU Ming(School of Information,Beijing Wuzi University,Beijing 101149,China)

机构地区：[1]北京物资学院信息学院,北京101149

出　　处：《电子器件》2020年第3期585-589,共5页Chinese Journal of Electron Devices

基　　金：北京高校物流技术工程研究中心项目(BJLE2010);中国物流学会、中国物流与采购联合会面上研究课题项目(2019CSLKT3-195);北京市社会科学基金项目(19GLC051)。

摘　　要：本文针对电晕放电离化FAIMS传感器的主要影响因素进行理论分析与实验研究。首先对离化源电晕放电过程及离子注入过程进行理论分析,找到气流与电场这两个重要因素进行实验研究与分析。观测了保持进入传感器总流量不变(2.5 L/min)的情况下,调节进入电晕放电区气流(0.5 L/min^2.3 L/min)对离子注入量和传感器检测的影响,结果表明放电区域气流量增大,离子注入数量显著增加,传感器的总体检测效率单调上升,从2.25%提升至12.5%,提升了约5.5倍,但观测到一个新的离子峰——电晕放电中间产物离子峰。在离化区施加周期电场,调节离子从离化源注入。通过电压幅度、占空比等参数调整,在频率为1 Hz,占空比为50%,幅度-50 V时,测量样品的离子峰幅度比无电场状况时提高了70%,并且其优势是在于不干扰电晕区域放电及离子反应过程的情况下提高产物离子的注入与使用效率。The characteristics of FAIMS sensor is studied. The theoretical analysis of ionization source corona discharge process and ion implantation process is carried out,and then two important factors of airflow and electric field are found. While the total flow rate is set at 2.5 L/min,the effect of adjusting the air flow into the corona discharge zone(0.5 L/min^2.3 L/min)on the ion implantation amount is observed. The results show that the gas flow in the discharge area is increased,the number of ions increased significantly,and the overall detection efficiency of the sensor increased monotonously,from 2.25% to 12.5%,which is increased by about 5.5 times. However,a new ion peak,ion peak of corona discharge intermediate product,is observed. A periodic electric field is applied in the ionization region which is used to regulate ion injection from the ionization source. The ion peak amplitude measurement sample than no electric field is increased by 70%.

关 键 词：高场非对称波形离子迁移率谱 电晕放电 离子注入 气体传感器 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]