基于传输矩阵法的多层介质膜反射特性研究  

Reflection characteristics of multilayer dielectric film based on transfer matrix method

作　　者：马海霞[1] 武艳军 王吉明[1] 路元刚[1] 杨雁南[1] MA Hai-xia;WU Yan-jun;WANG Ji-ming;LU Yuan-gang;YANG Yan-nan(Department of Applied Physics,Nanjing University of Aeronautics and Astronautics,Nanjing,Jiangsu 211106,China)

机构地区：[1]南京航空航天大学理学院,江苏南京211106

出　　处：《大学物理》2020年第8期25-30,共6页College Physics

基　　金：2019年校级教育教学改革研究项目(精品课程建设专项)(2019JG0840K);教育部高等学校电子信息类专业教学指导委员会光电信息科学与工程专业教学指导分委员会2019年教育教学研究项目资助。

摘　　要：薄膜干涉是大学物理波动光学教学的重要内容,也是薄膜光学的理论基础.薄膜干涉的一个重要应用是用于设计减反膜和高反膜.本文基于传输矩阵法,定量计算了多层介质膜的反射率.以BK7玻璃为例,无镀膜时在可见光范围内,其反射率约为4%.利用薄膜的相消干涉可以减少表面的反射率.镀一层减反膜时,对设计波长550 nm其反射率下降为1.3%,一旦偏离设计波长减反效果变差;镀两层减反膜时,在470 nm^670 nm范围内,减反效果明显改善,反射率均低于1.3%.利用薄膜的相长干涉可以增加表面的反射率.以熔石英为例,镀一层薄膜时,对设计波长1500 nm其反射率可由未镀膜时的3.3%提高到30%;镀七组薄膜时在1360 nm^1660 nm范围内其反射率均可达99%以上.通过这些定量计算,让学生更加深刻地理解所学理论知识在实际中的应用,培养工程意识,提高学习兴趣.Thin film interference is an important content in the teaching of wave optics in University Physics,and it is also the theoretical basis of thin film optics.One of the most important applications of thin film interference is to design antireflection and high reflection coatings.Reflectance of multilayer dielectric film is quantitatively calculated based on transfer matrix method in the manuscript.The reflectance of the one BK7 glass surface without coatings is about 4%over the visible spectrum;Low reflectance can be obtained by destructive interference of the thin film.The reflectance of single antireflection coating on glass decreases to 1.3%at the designed wavelength,550 nm.However,performance of such quarter-wave coatings falls off when deviating from the designed wavelength.The reflectance of double antireflection coatings on glass maintains low reflectance,less than 1.3%,over the 470~670 nm wavelength range.On the contrary,high reflectance can be obtained by constructive interference of the thin film.The reflectance of fused quartz can be increased from 3.3%for the bare surface to 30%for the single layer high reflection coating at the designed wavelength,1500 nm.The reflectance of the seven groups of films can reach more than 99%over the 1360~1660 nm wavelength range.Through these quantitative calculations,students can have a deeper understanding of the application of theoretical knowledge in practice,cultivate their engineering awareness and enhance their interest in learning.

关 键 词：薄膜干涉 传输矩阵法 减反膜 高反膜 

分 类 号：O436.1[机械工程—光学工程]