音圈变形镜的设计及其力学特性分析  

Design of voice-coil deformable mirror and its mechanical characteristics

作　　者：刘新宇 曹朔 胡栋挺 马文超 赵子云 吴晶晶 朱华新[1,2] 苏宙平 张逸新[1,2] 胡立发 LIU Xin-yu;CAO Shuo;HU Dong-ting;MA Wen-chao;ZHAO Zi-yun;WU Jing-jing;ZHU Hua-xin;SU Zhou-ping;ZHANG Yi-xin;HU Li-fa(School of Science, Jiangnan University, Wuxi 214122, China;Jiangsu Provincial Research Center of Light Industry Opto-electronic Engineering and Technology, Wuxi 214122, China)

机构地区：[1]江南大学理学院,江苏无锡214122 [2]江苏省轻工光电工程技术研究中心,江苏无锡214122

出　　处：《液晶与显示》2020年第8期801-807,共7页Chinese Journal of Liquid Crystals and Displays

基　　金：国家自然科学基金面上项目(No.61475152)。

摘　　要：针对7单元音圈变形镜的结构进行了设计,对镜面进行了力学分析,并基于有限元ANSYS软件对镜面不同材料及物理参数对最大变形量及镜面应力的影响关系进行了仿真。实验结果表明,所设计的音圈变形镜在镜面具有优良力学特性的条件下,基本满足了变形镜对校正量、影响函数等主要性能指标的要求。仿真结果可以为更多驱动单元数的音圈变形镜提供参考。The structure of 7 actuators VDM is designed,and the mechanical characteristics of its mirror are analyzed based on the finite element method with ANSYS software.The maximum deformation and stress of the VDM under different material and physical parameters are simulated and discussed.The results show that the designed VDM has an outstanding comprehensive performance,and basically meets the requirements of applications.Our simulation results can provide a reasonable reference for the application of VDM.

关 键 词：变形镜 音圈驱动器 光学玻璃 自适应光学 有限元分析 

分 类 号：O753.2[理学—晶体学]