采用恒频参量激励的微机械陀螺驱动控制方案  

MEMS gyroscopes parametric excitation control scheme with constant resonant frequency

作　　者：林一羽[1] 郑旭东[1] 吴海斌 马志鹏[1] 金仲和[1] LIN Yi-yu;ZHENG Xu-dong;WU Hai-bin;MA Zhi-peng;JIN Zhong-he(Micro-satellite Research Center,Zhejiang University,Hangzhou 310027,China)

机构地区：[1]浙江大学微小卫星研究中心,浙江杭州310027

出　　处：《浙江大学学报（工学版）》2019年第9期1795-1804,共10页Journal of Zhejiang University：Engineering Science

基　　金：国家杰出青年科学基金资助项目(61525403);浙江省自然科学基金/青年基金资助项目(LQ19F040011).

摘　　要：提出一种基于恒定谐振频率和参量激励的微机械(MEMS)陀螺驱动控制方案.该方案利用三角形栅极电容实现,使得陀螺驱动谐振频率和品质因子在环境波动下保持恒定,改善陀螺的温度敏感性.介绍基于三角形栅极电容的频率调谐和参量激励理论,提出并实现新型恒定谐振频率和参量激励驱动方案.仿真结果表明,对陀螺驱动模态的实时调谐使得谐振频率恒定;参量激励实现了对驱动模态的稳幅控制.实验结果表明,该方案测得的陀螺的Allan方差偏置不稳定性为1.69°/h,优于传统方案;降温过程中零偏温漂相比传统方案减小了50%.A novel drive-mode control scheme for MEMS gyroscopes was presented,where the gyroscopes were parametrically excited with constant resonant frequency.The proposed control scheme enabled a constant resonant frequency excitation with parametric amplification in the drive mode via triangular parallel capacitors,to keep the resonant frequency and quality factor constant against environmental fluctuations,and to improve the gyroscope temperature performance.First,frequency tuning and parametric excitation by means of triangular capacitors were introduced.Then,a new control scheme based on parametric excitation at constant frequency was proposed and implemented.The simulation results indicate that the resonant frequency is tuned to be constant and the dive-mode vibration amplitude is controlled to be stable.Finally,the experimental results indicate that the bias instability of gyroscope was 1.69°/h,which was better than that of the traditional scheme,and the temperature drift of zero-rate output during temperature cooling down was reduced to half compared to the traditional control scheme.

关 键 词：微机械(MEMS)陀螺 驱动控制方案 参量激励 恒谐振频率驱动 三角形栅极电容 

分 类 号：U666.21[交通运输工程—船舶及航道工程]