芯片级节流制冷器(MMR)的制造加工工艺研究进展及实验研究  

Fabrication Technology Development and Experimental Research of Microminiature Refrigerator

作　　者：童欣 陈晓屏[1] 李家鹏[1] 邱杰 乔勇[1] 槐阳 TONG Xin;CHEN Xiaoping;LI Jiapeng;QIU Jie;QIAO Yong;HUAI Yang(Kunming Institute of Physics,Kunming 650223,China)

机构地区：[1]昆明物理研究所,昆明650223

出　　处：《真空与低温》2020年第4期301-309,共9页Vacuum and Cryogenics

摘　　要：芯片级节流制冷器(MMR)是一种采用独特的微加工工艺制成的微型节流制冷器,其结构微小,最小体积可达15 mm×2 mm×0.5 mm。MMR在制冷量需求较小的微型元件冷却领域有着广泛的应用。介绍了MMR制造工艺的发展历程,分析了MMR的不同材料的选择、刻蚀方法、制冷器片密封方法以及制冷器气路、电路连接方法的特点,对比了各个工艺方法的优势和不足,并初步进行了MMR的制造加工和性能实验,得到了能够在7 MPa下稳定工作的MMR样品,并实现了32.6 K的制冷温降。对MMR工艺技术的改进和未来发展提出了一些建议。Microminiature refrigerator(MMR)is fabricated by novel micromachining technology. It is smaller than any other refrigerators,with a minimum size of 15 mm×2 mm×0.5 mm. The MMR has been wildly used to cool down micro elements with small refrigerating capacity requirement. This article mainly reports the development of fabrication technology of MMR,analyzes different methods of material choosing,channel etching,MMR sealing and connecting of gas way and circuit. Advantages and disadvantages of those methods are compared and investigated. MMR test samples were designed,fabricated and tested,7.2 MPa working pressure and 32.6 K temperature drop were achieved. Advices about technology improvement and future adhibition of MMR are proposed.

关 键 词：微加工 芯片级节流制冷器 实验研究 

分 类 号：TB651[一般工业技术—制冷工程]