热解炭涂层在单晶硅用炭/炭热场材料中的应用及研究进展  

Application and research progress of pyrolytic carbon coating in carbon/carbon thermal field materials for monocrystalline silicon

作　　者：程皓 赵杉[1] 康媛媛 白鸽 康文杰 苏君明 张永辉 CHENG Hao;ZHAO Shan;KANG Yuan-yuan;BAI Ge;KANG Wen-jie;SU Jun-ming;ZHANG Yong-hui(Xi'an Chaoma Technology Co.,Ltd.,Shaanxi Xi'an 710025,China;Xi'an Aerospace Composite Materials Institute,Shaanxi Xi'an 710025,China)

机构地区：[1]西安超码科技有限公司,陕西西安710025 [2]西安航天复合材料研究所,陕西西安710025

出　　处：《炭素》2020年第2期24-27,共4页Carbon

摘　　要：热解炭涂层技术是目前解决单晶硅生产用炭/炭热场材料高温侵蚀的有效方法之一,本文介绍了热解炭涂层的制备技术及优缺点,综述了热解炭涂层在炭/炭热场材料领域的应用及研究进展,对炭/炭热场材料高温抗侵蚀涂层提出了建议和发展方向。Pyrolytic carbon coating technology is one of the effective methods to solve the high temperature erosion of carbon/carbon thermal field materials used in the production of single crystal silicon.The preparation and properties for the pyrolytic carbon coatings were introduced.The application and research progress in the field of carbon/carbon thermal field materials were reviewed,and the future development direction of high temperature anti-corrosion coating system for carbon/carbon thermal field materials was put forward.

关 键 词：炭/炭热场材料 直拉法 热解炭涂层 

分 类 号：TQ127.1[化学工程—无机化工]